Results 181 to 190 of about 6,247 (204)

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Opto-Electronic Advances, 2021
Qianbo Lu, Xuewen Wang
exaly  

Design of MOEMS gyroscope

2008
Shufen Chen, Yi Zhao
openaire   +1 more source

Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

IEEE Journal of Selected Topics in Quantum Electronics, 2011
Göran N Stemme, Frank Niklaus
exaly  

Towards toxicity detection using a lab-on-chip based on the integration of MOEMS and whole-cell sensors

Biosensors and Bioelectronics, 2008
Noel M Elman, Hadar Ben-Yoav, Slava Krylov   +2 more
exaly  

MOEMS/NOEMS

2016
openaire   +1 more source

Design and realization of retina-like three-dimensional imaging based on a MOEMS mirror

Optics and Lasers in Engineering, 2016
Jie Cao, Qun Hao, Yuxin Peng
exaly  

Principles of MEMS and MOEMS

2005
N. P. Mahalik, S. E. Iyuke, B. H. Ahn
openaire   +1 more source

Design, Optimization, and Realization of a High-Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer

Journal of Microelectromechanical Systems, 2017
Qianbo Lu, Jian Bai, Kaiwei Wang
exaly  

MOEMS uniaxial accelerometer based on EpoClad/EpoCore photoresists with built-in fiber clamp

Sensors and Actuators A: Physical, 2013
exaly  

A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications

Sensors and Actuators A: Physical, 2010
Karolina, Christophe Gorecki, Małgorzata Kujawińska   +2 more
exaly