Results 161 to 170 of about 6,247 (204)
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MOEMS Gyroscope based on acoustooptic mode coupling
Optical Sensors and Biophotonics II, 2010A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg−1s−1 in the angular rate range of 0 –400deg/s.
Shu-xiang Lu, Shu-fen Chen, Yi Zhao
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Research of MOEMS Pressure Sensor
Applied Mechanics and Materials, 2013In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc..
De En +4 more
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Retro-Reflection Type MOEMS VOA
IEEE Photonics Technology Letters, 2004Novel microoptoelectromechanical systems (MOEMS) variable optical attenuators (VOAs) using retro-reflection attenuation scheme with initially open and closed states are proposed and characterized in this letter. This VOA device is comprised of two movable reflective micromirrors that are allocated in the front of input and output fibers and then ...
C. Chen, C. Lee, J.A. Yeh
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2017
Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) packaging are much different from conventional integrated circuit (IC) packaging. Many MEMS and MOEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment ...
Ajay P. Malshe, John Patrick O’Connor
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Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) packaging are much different from conventional integrated circuit (IC) packaging. Many MEMS and MOEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment ...
Ajay P. Malshe, John Patrick O’Connor
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Digital photographic imaging using MOEMS
SPIE Proceedings, 2006In previous work, we proposed a method for imaging using micro optical electromechanical (MOEM) mirrors. Our solution was to introduce into the imaging sensor optics a 2-D micro-mirror array. This device provides high resolution images with a wide field of view. In this paper, we provide further simulations that validate the functionality of our system
Vasileios T. Nasis +2 more
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A Closed-Loop MOEMS Accelerometer
2022In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-P rot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-shaped springs.
Taghavi, Majid +6 more
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High-Sensitivity Graphene MOEMS Resonant Pressure Sensor
ACS Applied Materials & Interfaces, 2023Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene.
Yujian Liu +6 more
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Polymeric MOEMS Variable Optical Attenuator
IEEE Photonics Technology Letters, 2006In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles of microoptoelectromechanical systems and photonic lightwave circuits.
A. Llobera +4 more
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Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design, 2006
In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (ICs).
Marina Lyshevski, Sergey Lyshevski
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In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (ICs).
Marina Lyshevski, Sergey Lyshevski
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Lifetime Estimation of Moems Devices
Journal of Electronic Packaging, 2006Generally, microelectro mechanical systems (MOEMS) devices require encapsulation for protecting their fragile and tiny inner components in a hermetically sealed cavity. Cavity hermeticity can be critical to the device performance and plays a vital role with respect to reliability and long-term drift characteristics of the MOEMS products.
T. Bar-Kohany, A. Stern
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