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III-V Semiconductor based MOEMS devices for optical telecommunications
Microelectronic Engineering, 2002exaly
MOEMS microspectrometer improves NIR sensitivity
TrAC Trends in Analytical Chemistry, 2006openaire +1 more source
Optical MOEMS 2003 Author Index
2003 IEEE/LEOS International Conference on Optical MEMS (Cat No 03EX682) OMEMS-03, 2003openaire +1 more source