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Design and development of auto-parametrically resonating angular rate sensors [PDF]
, 2021 Gadhavi, Bhargav, Gadhavi, Bhargav
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TailorMat Nanoparticles for Easy Clean Glass Surfaces [PDF]
, 2007 Brummersted Iversen, Steen +3 more
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MOEMS Gyroscope based on acoustooptic mode coupling
Optical Sensors and Biophotonics II, 2010A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg−1s−1 in the angular rate range of 0 –400deg/s.
Shu-xiang Lu, Shu-fen Chen, Yi Zhao
exaly +5 more sources
Research on angle actuator of spatial resonance MOEMS gyroscope
SPIE Proceedings, 2008A novel actuator of small angle control is researched and designed in this paper, which can be used in micro optical electro-mechanical system (MOEMS) gyroscope. This actuator is composed of three pieces of piezoelectric ceramics (PZT), foundation base and gear frame.
Zaiyou Pan, Huilan Liu, Lishuang Feng
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Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials
IEEE Transactions on Instrumentation and Measurement, 2016This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an optical output and operates in a resonant condition. A custom fabrication technology, based on a silicon-on-insulator substrate, has been considered for the development of the inertial sensor.
TRIGONA, CARLO +2 more
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Investigation and analysis of a MOEMS gyroscope based on novel resonator
2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT), 2010In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity — planar microdisk cavity as the core sensing element. The planar microdisk cavity was designed with high Q value and small volume, and the processing technology of the planar microdisk cavity was discussed in detail with the micro ...
Zhao Min +6 more
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IEEE Sensors Journal, 2019
In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system with 2 degrees of freedom and a decoupling frame. The optical sensing system consists of a laser diode light source, a tunable photonic crystal, a photodetector, and ...
Arash Sheikhaleh +2 more
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In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system with 2 degrees of freedom and a decoupling frame. The optical sensing system consists of a laser diode light source, a tunable photonic crystal, a photodetector, and ...
Arash Sheikhaleh +2 more
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Structural design and simulation of a MOEMS gyroscope based on subwavelength grating detection
Applied OpticsA novel, to the best of our knowledge, out-of-plane microelectromechanical system (MOEMS) gyroscope based on Wood’s type anomaly utilizing a subwavelength grating pair has been proposed. Based on this anomalous diffraction phenomenon, tiny changes in the displacement of the nanostructured grating elements lead to a dramatic increase or decrease of the ...
RuoXi Li +6 more
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Designing of a MOEMS Gyroscope Based on an Asymmetric-Grating Hybrid-Plasmonic ROC
Arabian Journal for Science and Engineering, 2023Jalal Gholinejad, Kambiz Abedi
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High-Sensitivity MOEMS Gyroscope Based on Photonic Crystal Wavelength Modulation
IEEE Sensors JournalXiuhua Yang +5 more
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