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Research on a novel MOEMS interferometric gyroscope
SPIE Proceedings, 2006MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro-Mechanical System) fabrication technique. It is solid-state.
Huilan Liu +3 more
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High-sensitivity MOEMS gyroscope utilizing the sub-wavelength grating–waveguide mode coupling effect
Applied OpticsMicro-electro-mechanical system (MEMS) gyroscopes based on the Coriolis principle have numerous potential applications, including industrial automation, motion control, inertial navigation, and automotive systems. In this paper, we present a novel (to our knowledge) micro-opto-electro-mechanical system (MOEMS) gyroscope design based on the grating ...
Li Jin +6 more
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Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure
Plasmonics, 2022Jalal Gholinejad, Kambiz Abedi
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Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure
Plasmonics, 2023Kambiz Abedi
exaly
Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS
IEEE Journal of Selected Topics in Quantum Electronics, 2011Göran N Stemme, Frank Niklaus
exaly
A parametrically excited MEMS gyroscope with optical readout: Design and simulation
Precision EngineeringHassan Salarieh, Javad Akbari
exaly