High-accuracy Motion Estimation for MEMS Devices with Capacitive Sensors [PDF]
, 2018 With the development of micro-electro-mechanical system (MEMS) technologies, emerging MEMS applications such as in-situ MEMS IMU calibration, medical imaging via endomicroscopy, and feedback control for nano-positioning and laser scanning impose needs ...
Chen, Yi
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Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force [PDF]
, 2020 We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive electrostatic force. The moving element in this system undergoes motion in two dimensions.
Daeichin, Meysam +2 more
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Issues and Challenges of Sensor Technologies in Microelectromechanical System (MEMS) in Smartphones for Motion Tracking Applications [PDF]
, 2018 Following the popularity of smartphone, the needs for accurate motion tracking have grown rapidly. Microelectromechanical system (MEMS) sensor has been commonly used in smartphones. Inertia Measurement Unit (IMU) usually functions in motion sensing.
Ching, LC +8 more
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The development of micromachined gyroscope structure and circuitry technology. [PDF]
Sensors (Basel), 2014 Xia D, Yu C, Kong L.
europepmc +1 more source
Wafer-Level Vacuum Packaging of Smart Sensors. [PDF]
Sensors (Basel), 2016 Hilton A, Temple DS.
europepmc +1 more source
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. [PDF]
Micromachines (Basel)Xin C, Xu Y, Zhang Z, Li M.
europepmc +1 more source
Design of an integrable double-sided optoplasmonic gyroscope via a bent hybrid structure. [PDF]
Sci RepGholinejad J, Abedi K.
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Моделювання інтегруючого режиму роботи мікро-електро-механічного гіроскопа [PDF]
Робота публікується згідно наказу Ректора НАУ від 27.05.2021 р. № 311/од " Про розміщення кваліфікаційних робіт здобувачів вищої освіти в репозиторії університету".
Terelyak, Maksym Stefanovych +1 more
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Nanophotonic Materials and Devices: Recent Advances and Emerging Applications. [PDF]
Micromachines (Basel)Chou Chau YF.
europepmc +1 more source