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Selective epitaxial growth by molecular beam epitaxy

Semiconductor Science and Technology, 1993
Selective epitaxial growth by molecular beam epitaxy (MBE) is realized at rather high substrate temperatures: 700 degrees for GaAs and 550 degrees C for InAs with a growth rate of 0.7 mu m h-1. Selectivity depends significantly on growth rate, As pressure and substrate temperature. Growth kinetic studies are carried out.
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Molecular beam epitaxy

Progress in Solid State Chemistry, 1975
A.Y. Cho, J.R. Arthur
openaire   +2 more sources

Molecular Beam Epitaxy

1996
Marian A. Herman, Helmut Sitter
openaire   +1 more source

Molecular beam epitaxy

Microelectronics Reliability, 1974
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Molecular Beam Epitaxy

2015
John Orton, Tom Foxon
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Epitaxial Graphene Growth by Carbon Molecular Beam Epitaxy (CMBE)

Advanced Materials, 2010
Jeongho Park   +2 more
exaly  

Large Area Synthesis of 1D‐MoSe2 Using Molecular Beam Epitaxy

Advanced Materials, 2017
Sock Mui Poh   +2 more
exaly  

Molecular Beam Epitaxy

2004
Marian A. Herman   +2 more
openaire   +1 more source

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