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Errors in nanometrology by SEM
Nanotechnology, 2004Scanning electron microscopy (SEM) is widely used for the inspection of nanostructures such as nanocrystallites and nanotubes as well as quantum wells and many other sub-micrometre devices. Some published papers show that the apparent size of small details in SEM images appear larger than their real dimension as obtained from transmission electron ...
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Tools for Nanomanipulation and Nanometrology
Microscopy and Microanalysis, 2004Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
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Nanometrology - The Frontier of Precision
2005Nanotechnology, the engineering that deals with the production of systems whose tolerances lie in the domain of nanometers, is becoming increasingly important in many industrial fields. In order that nanotechnology create viable, commercial products, ultra-precision metrology will be required.
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Contributions of Capillary Electrophoresis in Analytical Nanometrology: A Critical View
Critical Reviews in Analytical Chemistry, 2022CARLOS Adelantado +2 more
exaly
Metrology and Nanometrology at Agricultural/Food/Nutraceutical Interface: An Updated Shot
Current Bioactive Compounds, 2022Antonello Santini +2 more
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Handbook of Surface and Nanometrology
2002Introduction-Surface and Nanometrology General Surface Metrology Background to Surface Metrology Nanometrology Book Structure Characterization The Nature of Surfaces Surface Geometry Assessment and Parameters Characterization Waviness Errors of Form Characterization of Structured and Free Form Surfaces Characterization of Defects on the Surface ...
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3D Nanomanufacturing and Nanometrology
2017Further scaling and miniaturization of nanodevices (nanoelectronics, Quantum devices bio-nano devices for healthcare) brings major manufacturing, metrology and characterization challenges that cannot be met anymore by current techniques. The High Volume Manufacturing industry requires, more than ever, metrology methods that routinely measure structural
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