Results 161 to 170 of about 1,529 (201)
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Nanometrological micromachined artefacts
Journal of Micromechanics and Microengineering, 1992The fabrication of some unique artefacts with critical dimensions from deep submicron to several microns is described. These have been fabricated in silicon, in phosphosilicate glass (PSG) and in polysilicon films. The thermal reflow properties of PSG have been used to obtain artefacts with smooth spherical and cylindrical surfaces and the phosphorus ...
Ensell, G. +4 more
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Nanometrology for industrial applications
e & i Elektrotechnik und Informationstechnik, 1998The development of continuously decreasing workpiece tolerances lies in one line with the perspective of nanotechnology. To fulfil metrological demands since about 1982 new high resolution and high precision measuring devices have been developed. These are computerized instruments and the measuring results are very illustrative figures of tested ...
D. Prostrednik, P. H. Osanna
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Metrologia, 1991
The Physikalisch-Technische Bundesanstalt (PTB) is engaged in a range of projects which call for dimensional precision of order 1 nm. These include research and development (i) to improve linear and angular displacement metrology; (ii) to investigate the physical interaction of high resolution probes with technical surfaces and microstructures and so ...
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The Physikalisch-Technische Bundesanstalt (PTB) is engaged in a range of projects which call for dimensional precision of order 1 nm. These include research and development (i) to improve linear and angular displacement metrology; (ii) to investigate the physical interaction of high resolution probes with technical surfaces and microstructures and so ...
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Role of NPL-India in Nanotechnology and Nanometrology [PDF]
Mapan - Journal of Metrology Society of India, 2013 This article is solely intended to elucidate in brief about some of the significant activities being persuaded in the laboratory with the intention of establishing nanotechnology and nanometrology program and objectives in conjunction with various ...
Srivastava, A. K.
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Dimensional nanometrology at PTB
2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings, 2012Dimensional metrology for micro- and even nanometer-sized objects is becoming increasingly important in industry branches like semiconductor and optical industries as well as in the fields of mechanical engineering, biology and medicine. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed in ...
H.-U. Danzebrink +6 more
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Superoscillatory nanometrology [PDF]
, 2019 Superoscillatory field created by Pancharatnam-Berry phase metasurface contains structured elements with orders of magnitude smaller than the wavelength of light. It is used as “optical ruler” for nanoscale diaplacement metrology with resolution of 2.3 nm.
Yuan, Guanghui, Zheludev, Nikolai
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Linear and traceable scales for nanometrology: Dissertation
2014Methods for the implementation of reliable, repeatable scales are central to all measurementtechniques. Laser interferometers and diffractometers can be used for accurate dimensionalmeasurements that are readily traceable to the definitions of the SI (Système International) units.
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