Results 91 to 100 of about 4,098 (213)
Multi-sensor Approach for Multivalent Applications in Nanometrology
International Journal of Automation and Smart Technology, 2012 The field of nanometrology is subject to increasing complexity as dimensional structures become more intricate with smaller structural widths and increasingly larger surface areas, and with the inclusion of thousands of inspection features.
Manske Eberhard, Gerd Jäger
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Scanning electron microscope image signal-to-noise ratio monitoring for micro-nanomanipulation.
, 2014 International audienceAs an imaging system, scanning electron microscope (SEM) performs an important role in autonomous micro-nanomanipulation applications. When it comes to the sub micrometer range and at high scanning speeds, the images produced by the
Dembélé, Sounkalo +2 more
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Advances in Materials Science and Engineering, 2019 The main challenge of the galfenol actuator for high-precision positioning is the inherent nonsmooth hysteresis, which may lead to undesirable inaccuracies or oscillations and even instability.
Shiping Jiang +3 more
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Applied Sciences, 2018 This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage.
Yindi Cai +4 more
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, 2010 We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in ...
A Dréau +14 more
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Coupling an epitaxial quantum dot to a fiber-based external-mirror microcavity
, 2009 We report the coupling of individual InAs quantum dots (QDs) to an external-mirror microcavity. The external mirror is bonded to a fiber and positioned above a semiconductor sample consisting of a QD-containing GaAs layer on top of a distributed Bragg ...
Flagg, Edward B. +4 more
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2D photonic-crystal optomechanical nanoresonator
, 2014 We present the optical optimization of an optomechanical device based on a suspended InP membrane patterned with a 2D near-wavelength grating (NWG) based on a 2D photonic-crystal geometry.
Antoni, T. +14 more
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Active stabilization of a Michelson interferometer at an arbitrary phase with sub-nm resolution
, 2013 We report on the active stabilization of a Michelson interferometer at an arbitrary phase angle with a precision better than one degree at $\lambda = 632.8$ nm, which corresponds to an optical path difference between the two arms of less than 1 nm.
Bajoni, Daniele +2 more
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Nanoscale Torsional Optomechanics
, 2012 Optomechanical transduction is demonstrated for nanoscale torsional resonators evanescently coupled to optical microdisk whispering gallery mode resonators.
Barclay, P. E. +6 more
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Heterodyne common-path grating interferometer with Littrow configuration [PDF]
[[abstract]]This paper presents a heterodyne common-path grating interferometer with Littrow configuration (HCGIL). The HCGIL can effectively overcome environmental disturbance effect and the DC offset and the amplitude variation of the measurement ...
[[corresponding]]Wu, Chyan-Chyi +1 more
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