Results 171 to 180 of about 5,552 (189)

A Novel Nanopositioning Stage Integrated With Voice Coil Motor and Active Eddy Current Damper

IEEE/ASME transactions on mechatronics
The flexure-based nanopositioning stages driven by the voice coil motors (VCMs) are increasingly demanded with the advantage of simultaneously achieving millimeter-scale stroke and nanoscale resolution.
Na Sang, Chi Zhang, Si-lu Chen, Xiaolu Huang, Dexin Jiang, Jin-hua Chen, Guilin Yang   +6 more
semanticscholar   +1 more source

High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

Advanced Lithography
For two decades, the Technische Universität Ilmenau has been developing high precision Nanopositioning and Nanomeasuring machines (NPMMs). These have proven their potential for nanometer accurate measurements in large volumes up to 200mm x 200mm x 25mm ...
I. Ortlepp
semanticscholar   +1 more source

Validation of MAPS: a novel 6-degree-of-freedom position sensor for nanopositioning

Measurement science and technology
Anemos’ multi-dimensional absolute position sensors (MAPS) consists of a photolithographically defined reference scale, a camera, and computer image processing that decodes the relative position of a camera to the scale.
Richard Aras, James W. Dallas, E. Heaps, Laszlo G. Varga, A. Yacoot   +4 more
semanticscholar   +1 more source

Non-Minimum-Phase Resonant Controller for Active Damping Control: Application to Piezo-Actuated Nanopositioning System

Control Engineering Practice
Nanopositioning systems frequently encounter limitations in control bandwidth due to their lightly damped resonance behavior. This paper presents a novel Non-Minimum-Phase Resonant Controller (NRC) aimed at active damping control within dual closed-loop ...
Aditya M. Natu, Hassan Hosseinnia
semanticscholar   +1 more source

Time-Frequency Analysis-Based Real-Time Iterative Compensation for Piezoelectric Nanopositioning Stage

IEEE/ASME transactions on mechatronics
Benefiting from its rapid response, high control bandwidth, and high precision, the piezoelectric actuator (PEA) has been extensively applied to various micro–nano motion circumstances.
Ze Wang, Bingyang Hou, Chuxiong Hu, Yu Zhu   +3 more
semanticscholar   +1 more source

Design of General Parametric Repetitive Control Using IIR Filter With Application to Piezo-Actuated Nanopositioning Stages

IEEE Transactions on Automation Science and Engineering
The achievable performance with repetitive control is limited due to its inherent sensitivity to the frequency shift away from the intended periodic frequencies and the undesired gain amplification of the aperiodic disturbances.
Linlin Li, Xiang-bei Wang, Wei-wei Huang, Xinquan Zhang, Limin Zhu   +4 more
semanticscholar   +1 more source

Equivalent Magnetic Network-Based Multiphysics Optimization of a Normal-Stressed Millimeter-Range Nanopositioning Stage

IEEE/ASME transactions on mechatronics
Establishing efficient and accurate analytical models for the normal-stressed electromagnetic actuators (NSEAs) is crucial for optimizing the magnetic stages to achieve desired working performance.
Yan-Ning Fang, Rongjing Zhou, Limin Zhu, Zhiwei Zhu   +3 more
semanticscholar   +1 more source

A robust fractional-order sliding mode control technique for piezoelectric nanopositioning stages in trajectory-tracking applications

Sensors and Actuators A: Physical, 2023
R. Xu, Zhongshi Wang, Miaolei Zhou, Dapeng Tian   +3 more
semanticscholar   +1 more source

Design of a redundant actuated 4-PPR planar 3-DOF compliant nanopositioning stage

Precision engineering, 2023
Miao Yang, Mingyang Sun, Zhe Wu, Jianhua Li, Yi Long   +4 more
semanticscholar   +1 more source

Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning

Journal of the Franklin Institute, 2023
Zhijun Yang, Ruirui Huang, Sen Chen, Liyun Su, Ruiqi Li   +4 more
semanticscholar   +1 more source