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Nanomeasuring and nanopositioning engineering
SPIE Proceedings, 2006Abstract The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm is explained.
G. Jäger +6 more
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Review of Scientific Instruments, 2023
Piezoelectric stick-slip driven nanopositioning stage (PSSNS) with nanometer resolution has been widely used in the field of micro-operation. However, it is difficult to achieve nanopositioning over large travel, and its positioning accuracy is affected ...
Keping Liu +5 more
semanticscholar +1 more source
Piezoelectric stick-slip driven nanopositioning stage (PSSNS) with nanometer resolution has been widely used in the field of micro-operation. However, it is difficult to achieve nanopositioning over large travel, and its positioning accuracy is affected ...
Keping Liu +5 more
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IEEE Transactions on Automation Science and Engineering
This paper proposes a novel adaptive global sliding mode control strategy for a two-degree-of-freedom (2-DOF) piezoelectric nanopositioning system based on the integral extended state observer (IESO) technique.
Liheng Chen, Zehao Wu, Qingsong Xu
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This paper proposes a novel adaptive global sliding mode control strategy for a two-degree-of-freedom (2-DOF) piezoelectric nanopositioning system based on the integral extended state observer (IESO) technique.
Liheng Chen, Zehao Wu, Qingsong Xu
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IEEE Transactions on Automation Science and Engineering, 2022
Flexure-based scanning stages driven by piezoelectric (PZT) actuator with large stroke, nanoscale precision, and high bandwidth are quite appealing for developing an advanced multiphoton polymerization 3-D nanolithography system.
Hui Tang +4 more
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Flexure-based scanning stages driven by piezoelectric (PZT) actuator with large stroke, nanoscale precision, and high bandwidth are quite appealing for developing an advanced multiphoton polymerization 3-D nanolithography system.
Hui Tang +4 more
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Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System
IEEE transactions on fuzzy systemsThe nonlinearity and cross-axis coupling of piezo-driven multiple-degree-of-freedom nanopositioning systems impose challenges to achieving precise and reliable motion control.
Liheng Chen, Qingsong Xu
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IEEE transactions on industrial electronics (1982. Print), 2022
This article presents a convex inner approximation approach for mixed ${H}_2$/${H}_\infty$ control of a flexure-based nanopositioning system. Generally for such positioning systems, the inevitable existence of model mismatch renders it often times ...
Jun Ma +6 more
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This article presents a convex inner approximation approach for mixed ${H}_2$/${H}_\infty$ control of a flexure-based nanopositioning system. Generally for such positioning systems, the inevitable existence of model mismatch renders it often times ...
Jun Ma +6 more
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Nanopositioning for storage applications
Annual Reviews in Control, 2011Abstract In nanotechnology applications, nanopositioning, i.e., nanometer-scale precision control at dimensions of less than 100 nm, plays a central role. One can view nanopositioners as precision mechatronics systems aiming at moving objects over a certain distance with a resolution that could be as low as a fraction of an Angstrom.
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Switched Amplifier-Driven Nanopositioning: Integrating System Modeling and Control Tuning
IEEE transactions on industrial electronics (1982. Print)This article presents the integrated mechatronic and control design of a switched current amplifier-driven high-precision positioning system. An optimization-based parameter tuning process for a highly integrated state-control structure is proposed ...
D. Pechgraber +3 more
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A Damped Decoupled XY Nanopositioning Stage Embedding Graded Local Resonators
IEEE/ASME transactions on mechatronics, 2022Lightly damping linear dynamic characteristics of a flexure-based stage mainly limit control bandwidth when its piezo-actuating hysteresis is well compensated.
Zhong Chen +4 more
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Impulsive control for nanopositioning
Proceedings of the 14th international conference on Hybrid systems: computation and control, 2011In this paper, impulsive control is applied to a class of linear feedback systems and studied both theoretically and experimentally, with a particular focus on the usage in nanopositioning. By using impulsive control, improvements in tracking performance and tolerance to measurement noise can be achieved which are beyond the limits of conventional ...
Tomas Tuma +3 more
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