Results 181 to 189 of about 5,552 (189)

Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles

Measurement
Yaxiong He, Rong-Wei Lin, Rui-jun Li, Jie Li, Z. Cheng, Qiaosheng Pan, Qiangxian Huang, Kuang-Chao Fan   +7 more
semanticscholar   +1 more source

Gate recurrent unit neural network based high-precision feedforward control for piezoelectric nanopositioning stage

Engineering applications of artificial intelligence
Bingyang Hou, Ze Wang, Chuxiong Hu, Yu Zhu   +3 more
semanticscholar   +1 more source

Phase leading active disturbance rejection control for a nanopositioning stage.

ISA transactions, 2021
Wei Wei, Zhiyuan Zhang, Min Zuo
semanticscholar   +1 more source

Design and analysis of piezo actuated flexure guided nanopositioning stage

Materials Today: Proceedings, 2023
Pankaj, V. Chandra, Ram Murat, Viresh Kumar   +3 more
semanticscholar   +1 more source

A Piezo-actuated Nanopositioning Stage Based on Spatial Parasitic Motion Principle

Sensors and Actuators A: Physical
Xiaolu Zhao, Fujun Wang, Beichao Shi, Yanling Tian, Dawei Zhang   +4 more
semanticscholar   +1 more source

On the actuation nonlinearity of normal-stressed electromagnetic nanopositioning stages

Precision engineering
Li Chen, Qiang Liu, Limin Zhu, Zhiwei Zhu   +3 more
semanticscholar   +1 more source

A Delay-based Nonlinear Controller for Nanopositioning of Linear Ultrasonic Motors

International Journal of Control, Automation and Systems
Luis Luna, Kevin López, Rubén Garrido, S. Mondié, Luis Cantera   +4 more
semanticscholar   +1 more source

An XYZ parallel nanopositioning stage with hybrid damping

Sensors and Actuators A: Physical
Zhong Chen, Yuliang Qiu, Xineng Zhong, Xianmin Zhang   +3 more
semanticscholar   +1 more source

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

IEEE Transactions on Automation Science and Engineering, 2016
Guoying Gu, Limin Zhu, C. Su, H. Ding, S. Fatikow   +4 more
semanticscholar   +1 more source