Results 181 to 190 of about 5,555 (236)

High-speed spiral nanopositioning

IFAC Proceedings Volumes, 2011
Abstract Nanometer-precise positioning at ultra-high velocities is a major challenge for rapidly emerging applications that use scanning probes in order to observe and alter the properties of materials down to the nanoscale. Typical examples include surface imaging, nanolithography and data storage.
Andreas Kotsopoulos, Angeliki Pantazi, Abu Sebastian, Theodore Antonakopoulos   +3 more
openaire   +1 more source

Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide

IEEE transactions on industrial electronics (1982. Print), 2022
Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because the ...
Chi Zhang, Xiaolu Huang, Miao Yang, Si-lu Chen, Guilin Yang   +4 more
semanticscholar   +1 more source

Nanopositioning for probe storage

Proceedings of the 2005, American Control Conference, 2005., 2005
Scanning-probe data-storage devices are currently being explored as alternatives to conventional data storage. Ultra-high density, small form factor, and low cost are thought to be the primary advantages of probe storage. The ultra-high a real density makes nanopositioning a significant challenge in probe storage.
A. Sebastian, A. Pantazi, G. Cherubini, E. Eleftheriou, M.A. Lantz, H. Pozidis   +5 more
openaire   +1 more source

A Novel Nanopositioning Stage Integrated With Voice Coil Motor and Active Eddy Current Damper

IEEE/ASME transactions on mechatronics
The flexure-based nanopositioning stages driven by the voice coil motors (VCMs) are increasingly demanded with the advantage of simultaneously achieving millimeter-scale stroke and nanoscale resolution.
Na Sang, Chi Zhang, Si-lu Chen, Xiaolu Huang, Dexin Jiang, Jin-hua Chen, Guilin Yang   +6 more
semanticscholar   +1 more source

Development of a Nanopositioning Platform With Large Travel Range Based on Bionic Quadruped Piezoelectric Actuator

IEEE/ASME transactions on mechatronics, 2021
A piezoelectric platform driven by a bionic quadruped piezoelectric actuator is developed. It uses the operating principle of combining bionic walking and swinging actuation modes to achieve nanopositioning in a large travel range.
Jie Deng, Yingxiang Liu, Shijing Zhang, Jing Li   +3 more
semanticscholar   +1 more source

NanoPositioning – extreme calibration

Assembly Automation, 1996
NanoPositioning is a combination of piezoelectric ceramics, capacitance sensors and flexure hinges, and is the art of positioning in space with resolutions of one nanometre and less. Describes the technologies involved and how they are applied to the growing demand for precision mechanisms.
openaire   +1 more source

Image-Guided Trajectory Tracking Control of the Nanopositioning Stages Using Regional Dense Photometic Information

IEEE transactions on industrial electronics (1982. Print)
For compliant nanopositioning stages, the closed-loop control can effectively reduce the trajectory tracking error caused by modeling uncertainties and unknown disturbances. However, pose sensing solutions with multiple degrees of freedom, high precision,
Hai Li, Nuo Xu, Xianmin Zhang, Benliang Zhu   +3 more
semanticscholar   +1 more source

Maglev Linear Actuator for Nanopositioning

Microelectromechanical Systems, 2002
Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part.
Won-jong Kim, Himanshu Maheshwari, Jie Gu   +2 more
openaire   +1 more source

Validation of MAPS: a novel 6-degree-of-freedom position sensor for nanopositioning

Measurement science and technology
Anemos’ multi-dimensional absolute position sensors (MAPS) consists of a photolithographically defined reference scale, a camera, and computer image processing that decodes the relative position of a camera to the scale.
Richard Aras, James Dallas, E. Heaps, Laszlo G. Varga, A. Yacoot   +4 more
semanticscholar   +1 more source

High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

Advanced Lithography
For two decades, the Technische Universität Ilmenau has been developing high precision Nanopositioning and Nanomeasuring machines (NPMMs). These have proven their potential for nanometer accurate measurements in large volumes up to 200mm x 200mm x 25mm ...
I. Ortlepp
semanticscholar   +1 more source