Results 191 to 200 of about 5,555 (236)
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Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator
Frontiers of Information Technology & Electronic Engineering, 2023本文展现了一种基于洛伦兹力驱动器和柔顺导向的精密厘米级定位器. 通过使用一个额外的数模转换器(DAC)和运算放大器(op amp)电路, 以及合适的控制器将定位精度提高到纳米级. 首先, 基于柔顺导向模型的刚度为驱动器设计了恰当的线圈. 然后通过有限元分析(FEA)验证了柔顺机构和驱动器的性能. 基于此, 提出一种通过电子方式提升定位性能的方法及控制方案. 最后, 构建了原理样机并对其性能进行评估. 该定位器的特色在于其在10 mm行程内实现10 nm分辨率. 所提出的方案可以拓展适用于其他同类型系统.
B. J. Goteea, Qianjun Zhang, W. Dong
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Nanopositioning performance of MIMO MPC
2015 10th Asian Control Conference (ASCC), 2015Model predictive control (MPC) refers to a class of computer control algorithms which is commonly used when tracking a reference trajectory is the primary goal. It minimizes the steady-state tracking error, increases the closed-loop bandwidth, and enables the controller to track a reference signal, the major requirements for nanopositioning ...
M. S. Rana, H. R. Pota, I. R. Petersen
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Six-DOF Mechatronic Nanopositioning Device
IFAC Proceedings Volumes, 2002Abstract The ability to manufacture nanoscale devices in precisely controlled manner will be essential for the next-generation nanotechnology. This paper presents the mechanical design and instrumentation structure of a novel six-degree-of-freedom magnetically levitated stage for nanopositioning.
Won-Jong Kim +2 more
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Noise in Nanopositioning Systems
2014Mechanical and electrical noise in nanopositioning systems is unavoidable and dictates the maximum positioning resolution. The major sources of noise include sensor noise, amplifier noise, and external disturbances. In this chapter, these noise sources are discussed and their influence on positioning resolution is evaluated.
Andrew J. Fleming, Kam K. Leang
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Optical spectral encoding for nanopositioning
2018 International Conference Laser Optics (ICLO), 2018Methodology based on spectral encoding of broadband emission has been developed to control the position of a stage and its movement with nanometer precision. A distinctive feature of the methodology is that it allows to control the absolute position of the stage without pre-calibration.
I. G. Likhachev +2 more
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International Workshop on Advanced Motion Control
To control large nanopositioning and nanomeasuring machines with an accuracy of a few nanometers, accurate models are essential. Therefore, this paper presents a detailed model of such a machine that includes all interstage couplings.
Josias Rühle, Oliver Sawodny
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To control large nanopositioning and nanomeasuring machines with an accuracy of a few nanometers, accurate models are essential. Therefore, this paper presents a detailed model of such a machine that includes all interstage couplings.
Josias Rühle, Oliver Sawodny
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Advances in piezo-nanopositioning technology
Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003), 2004This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
K. Spanner, S. Vorndran
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Friction compensation for Nanopositioning and Nanomeasuring Machines
2010 11th IEEE International Workshop on Advanced Motion Control (AMC), 2010The presented work concerns the modeling and experimental verification of the highly nonlinear behavior in positioning on the nanometer scale. The main goal of this work is to identify and extend a simple dynamic friction model, which allows a model-based estimation of the friction force including the system inertia only based on a displacement input ...
Amthor, A. +2 more
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IEEE/ASME transactions on mechatronics
Benefiting from its rapid response, high control bandwidth, and high precision, the piezoelectric actuator (PEA) has been extensively applied to various micro–nano motion circumstances.
Ze Wang +3 more
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Benefiting from its rapid response, high control bandwidth, and high precision, the piezoelectric actuator (PEA) has been extensively applied to various micro–nano motion circumstances.
Ze Wang +3 more
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A MEMS Stage for 3-Axis Nanopositioning
2007 IEEE International Conference on Automation Science and Engineering, 2007Applications in micro and nanotechnologies require millimeter-sized devices that are capable of 3-axis positioning with motion ranges of micrometers and resolutions of nanometers. This paper reports on the design, fabrication, and testing of a MEMS-based 3-axis positioning stage.
Xinyu Liu, Keekyoung Kim, Yu Sun
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