Results 21 to 30 of about 541 (160)
Actuators, 2022 Nanopositioning technology is widely used in high-resolution applications. It often uses piezoelectric actuators due to their superior characteristics.
Ayad G. Baziyad +3 more
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Applied Sciences, 2018 This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage.
Yindi Cai +4 more
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Micromachines, 2022 The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical
Ning Chen, Xianfu Liu
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Development of a XYθz 3-DOF nanopositioning stage with linear displacement amplification device
MATEC Web of Conferences, 2017 The main purpose of this study is to develop a XYθZ 3-DOF nanopositioning stage with linear displacement amplification device. This stage is used by three groups of linear displacement amplification device to composition, and thus achieves precise XYθZ 3-
Chu Chih-Liang +2 more
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Development of a Sinusoidal Corrugated Dual-Axial Flexure Mechanism for Planar Nanopositioning
Actuators, 2022 Taking advantage of the concurrent stretching and bending property of corrugated flexure hinges, a sinusoidal corrugated flexure linkage was proposed and applied for the construction of a corrugated dual-axial mechanism with structural symmetry and ...
Yuhan Niu +4 more
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A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
MATEC Web of Conferences, 2016 This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two
Zhu Xiaobo, Wen Zhijie, Liu Pinkuan
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Hybrid Adaptive Controller Design with Hysteresis Compensator for a Piezo-Actuated Stage
Applied Sciences, 2022 Piezo-actuated stage (P-AS) has become the topic of considerable interest in the realm of micro/nanopositioning technology in the recent years owing to its advantages, such as high positioning accuracy, high response speed, and large output force ...
Yannan Zhang +4 more
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Dynamic Analysis of a 5‐DOF Flexure‐Based Nanopositioning Stage
Mathematical Problems in Engineering, 2019 A multibody dynamic model is developed for dynamic analysis of a 5‐DOF flexure‐based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5‐DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges.
Yiping Shen +3 more
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Multi-time Scale Control of Dual-Stage Nanopositioning Systems
IFAC-PapersOnLine, 2020 Abstract In this paper, a novel multi-time scale control technique is applied to a serial dual-stage nanopositioning system. Dual-stage nanopositioning systems combine a high-speed, short-range actuator and a low-speed, long-range actuator to achieve long-range and high-speed positioning.
Aleksandra Mitrovic +3 more
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Advances in Materials Science and Engineering, 2019 The main challenge of the galfenol actuator for high-precision positioning is the inherent nonsmooth hysteresis, which may lead to undesirable inaccuracies or oscillations and even instability.
Shiping Jiang +3 more
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