Results 271 to 280 of about 6,320,743 (323)
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A Pattern Reconfigurable Dielectric Resonator Antenna for Wireless Fidelity Applications
2016 International Conference on Frontiers of Information Technology (FIT), 2016A pattern reconfigurable dielectric resonator antenna for wireless fidelity (2.4 GHz) band is presented in this communication. A rectangular dielectric resonator antenna which is fed by a microstrip line serves as the main radiating element. The pattern reconfigurability is achieved by the introduction of slots on the ground plane. The switch placement
Sajid Aqeel +2 more
exaly +2 more sources
High fidelity radiation pattern measurement system for small antennas
2006 First European Conference on Antennas and Propagation, 2006 The paper describes a high fidelity system for measuring a radiation pattern of an electrically small antenna. In this system, the Antenna Under Test (AUT) equipped with a battery powered signal generator is suspended by a dielectric foam in the centre of a pair of dielectric rings that are supported by a pedestal of a spherical positioning mechanical ...
Kabacik, P. +3 more
openaire +3 more sources
Effect of absorber material and mask pattern correction on pattern fidelity in EUV lithography
SPIE Proceedings, 2004The printability of a dense line pattern and a model pattern using two configurations of absorber and buffer materials for the mask were examined through simulations. An absorber material with a small extinction coefficient of 0.025 must be thicker than one with a large extinction coefficient fo 0.040 to ensure sufficient reflectance contrast ...
Minoru Sugawara, Iwao Nishiyama
exaly +2 more sources
Pattern-Transfer Fidelity in Soft Lithography: The Role of Pattern Density and Aspect Ratio
Advanced Functional Materials, 2005AbstractUsing high‐aspect‐ratio nanostructures fabricated via two‐photon laser‐scanning lithography, we examine the deformation of elastomeric stamps used in soft nanolithography and the fidelity of patterns and replicas made using these stamps. Two‐photon laser‐scanning lithography enables us to systematically regulate the aspect ratio and pattern ...
T -W Lee +2 more
exaly +2 more sources
Robustness of interactive pattern fidelity error as a quality metric for integrated patterning
Advances in Patterning Materials and Processes XXXVI, 2019Multi-patterning, like LE and SAMP, has been in production for several years. It is expected to remain a standard in patterning, even in the case where industry adopts EUV photo lithography. As scaling continues, the precision of pattern placement remains challenging.
Soichiro Okada +2 more
exaly +2 more sources
Strategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography [PDF]
Nano Reseach, 2016 Position controlled nanowire growth is important for nanowire-based optoelectronic components which rely on light emission or light absorption. For solar energy harvesting applications, dense arrays of nanowires are needed; however, a major obstacle to ...
G. Otnes +7 more
semanticscholar +3 more sources
Pattern Fidelity in Submicron Lithography with a Rectangular Electron Beam
Japanese Journal of Applied Physics, 1983The energy density profiles deposited in a PMMA resist film by a 0.5 µm square electron beam are calculated by Monte Carlo simulation. The influence of a combination of beam accelerating voltages and beam edge widths on the pattern fidelity is studied by examining some characteristic parameters.
Tsuneo Okubo, Kiichi Takamoto
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Photomask Technology, 2023
Curvilinear mask is getting more widely used as a key technique for resolution enhancement with the progress of feature size shrinkage and multi-beam mask writers (MBMW) adoption.
Ai Kaneko +8 more
semanticscholar +1 more source
Curvilinear mask is getting more widely used as a key technique for resolution enhancement with the progress of feature size shrinkage and multi-beam mask writers (MBMW) adoption.
Ai Kaneko +8 more
semanticscholar +1 more source
A lithographic mask manufacturability and pattern fidelity aware OPC algorithm
International Symposium on VLSI Design, Automation and Test, 2016exaly +2 more sources