Results 1 to 10 of about 17,195 (246)
Cryo-electron tomography reconstructs polymer in liquid film for fab-compatible lithography [PDF]
Nature CommunicationsLiquid film is ubiquitous in nature and serves as the critical medium for the dissolution of photoresist to create nanoscale circuit patterns in lithography, which is a core task since the birth of semiconductor industry.
Liming Zheng +15 more
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Negative-tone molecular glass photoresist for high-resolution electron beam lithography [PDF]
Royal Society Open Science, 2021 A low molecular weight organic compound containing bis-phenol A backbone (BPA-6OH) is reported as a negative-tone photoresist. This material has a high glass transition temperature and excellent thermal stability.
Yafei Wang +5 more
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Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance
Sensors, 2021 Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics.
Yingying Dou +3 more
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Edge beads removal in a photolithography process through a polymer mold [PDF]
Songklanakarin Journal of Science and Technology (SJST), 2021 In this paper, a new approach for achieving a higher uniformity while spinning photoresist is presented. The proposed method allows to overcome the well-known problem of the edge beads formation, which shows either with circular, small or irregular ...
Stefania Torino +7 more
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Cell Culture on Low-Fluorescence and High-Resolution Photoresist
Micromachines, 2020 2D and 3D topographic cues made of photoresist, a polymer, are used for cell culture and cell analysis. Photoresists used for cell analysis provide the surface conditions necessary for proper cell growth, along with patterning properties of a wide range ...
Hidetaka Ueno +4 more
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Advanced Materials Interfaces, 2023 Continuing extreme downscaling of semiconductor devices, essential for high performance and energy efficiency of future microelectronics, hinges on extreme ultraviolet lithography (EUVL) and addressing associated challenges.
Ashwanth Subramanian +7 more
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Quantum Dot-Based White Organic Light-Emitting Diodes Excited by a Blue OLED
Applied Sciences, 2022 In this study, white organic light-emitting diodes (OLEDs) consisting of red quantum dots (RQD) and green quantum dots (GQD) were investigated. These are the most exciting new lighting technologies that have grown rapidly in recent years.
Krishn Das Patel +4 more
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Fabrication of Multilayer Molds by Dry Film Photoresist
Micromachines, 2022 Dry film photoresists are widely employed to fabricate high-aspect-ratio microstructures, such as molds for microfluidic devices. Unlike liquid resists, such as SU-8, dry films do not require a cleanroom facility, and it is straightforward to prepare ...
Narek E. Koucherian +2 more
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Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes
Micromachines, 2018 This letter proposes a method for utilizing a positive photoresist, Shipley 1805, as a sacrificial layer for sub-180 °C fabrication process flows. In the proposed process, the sacrificial layer is etched at the end to release the structures using a ...
Hani H. Tawfik +3 more
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Molecules, 2023 This article reports on the synthesis of materials containing both a fluoroalkyl group and a diazonaphthoquinone (DNQ) moiety as well as the fabrication of negative- and positive-tone stencil patterns.
Gayoung Kim +7 more
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