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Method for plasma etching of a material.
1987HENRY, DANIEL, BOSWELL, RODERICK
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ANISOTROPIC SILICON ETCHING IN FLUORINATED PLASMA
1988CHEN LEE, MATHAD GANGADHARA S
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Etching methods with alternating non-plasma and plasma etching processes
GUO XIANGYU, STAFFORD NATHANopenaire +1 more source