Results 291 to 300 of about 2,786,485 (335)

Non‐Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Advanced Materials, 2011
Ville Jokinen, Ali Shah, Sami Franssila
exaly  

An efficient approach for atomic-scale polishing of single-crystal silicon via plasma-based atom-selective etching

International Journal of Machine Tools and Manufacture, 2020
Hui Deng
exaly  

Plasma Etching

2015
openaire   +1 more source

Plasma Etch

2007
Peter Ventzek, Shahid Rauf, Terry Sparks
openaire   +1 more source

Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching

Plasma chemistry and plasma processing, 2017
D. Elg, Gianluca A. Panici, Sumeng Liu, G. Girolami, S. Srivastava, D. Ruzic   +5 more
semanticscholar   +1 more source

Plasma Etching

2016
openaire   +1 more source

The interplay between surface charging and microscale roughness during plasma etching of polymeric substrates

, 2018
George Memos, E. Lidorikis, G. Kokkoris
semanticscholar   +1 more source

Investigation of feature orientation and consequences of ion tilting during plasma etching with a three-dimensional feature profile simulator

, 2017
Yiting Zhang, C. Huard, S. Sriraman, Jun R. Belen, A. Paterson, M. Kushner   +5 more
semanticscholar   +1 more source

Selective Etching of Graphene Edges by Hydrogen Plasma

Journal of the American Chemical Society, 2010
Liming Xie, Liying Jiao, Hongjie Dai
exaly  

Plasma etching

2004
openaire   +1 more source