Results 281 to 290 of about 2,786,485 (335)

Introduction to Plasma Etching

1997
Plasma etching has become a crucial process step for the microelectronics industry, as computer logic and memory circuits require increasingly precise fabrication of fine-scale patterns in semiconductors, metals, and insulators. Plasma etching generally involves the dissociation and ionization of a neutral precursor gas to form reactive neutral ...
openaire   +1 more source

Tuning the thickness of exfoliated quasi-two-dimensional β-Ga2O3 flakes by plasma etching

, 2017
Yongbeom Kwon, Geonyeop Lee, Sooyeoun Oh, J. Kim, S. Pearton, F. Ren   +5 more
semanticscholar   +1 more source

Plasma etching

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
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Superhydrophobic Paper by Facile and Fast Atmospheric Pressure Plasma Etching

, 2017
P. Dimitrakellis, A. Travlos, V. Psycharis, E. Gogolides   +3 more
semanticscholar   +1 more source

Plasma etching

Microelectronics Reliability, 1980
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Plasma Etching

1983
J. A. MUCHA, D. W. HESS
openaire   +1 more source

Regulation of defects and nitrogen species on carbon nanotube by plasma-etching for peroxymonosulfate activation: Inducing non-radical/radical oxidation of organic contaminants

Journal of Hazardous Materials, 2023
Yongze Liu
exaly  

Microwave plasma etching

Vacuum, 1984
Keizo Suzuki, Ken Ninomiya, Shigeru Mishimatsu   +2 more
openaire   +1 more source

Plasma Etching

2011
openaire   +2 more sources

Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features

, 2017
C. Huard, Yiting Zhang, S. Sriraman, A. Paterson, M. Kushner   +4 more
semanticscholar   +1 more source