Results 281 to 290 of about 1,458,991 (299)

Plasma etching

Microelectronics Reliability, 1980
openaire   +1 more source

Plasma etching method and plasma etching apparatus

2014
openaire   +2 more sources

Plasma Etching

2016
openaire   +1 more source

Introduction to ion and plasma etching Available to Purchase

Journal of Vacuum Science and Technology, 1976
exaly  

A kinetic study of the plasma‐etching process. I. A model for the etching of Si and SiO2 in CnFm/H2 and CnFm/O2 plasmas

Journal of Applied Physics, 1982
exaly  

Plasma etching

2005
SRINIVASAN ANAND, CARLSTROM CARL-FREDRIK, LANDGREN GUNNAR   +2 more
openaire   +1 more source

Plasma Etching

1989
openaire   +1 more source

Plasma beam studies of Si and Al etching mechanisms

Journal of Vacuum Science and Technology, 1982
exaly  

Plasma etching

2004
openaire   +1 more source

ETCHING METHOD AND PLASMA ETCHING MATERIAL

2019
URABE KEIICHIRO, SHEN PENG, HSU CHIH-YU, STAFFORD NATHAN   +3 more
openaire   +1 more source