Results 261 to 270 of about 1,458,991 (299)
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
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Basic chemistry and mechanisms of plasma etching
Journal of Vacuum Science & Technology B, 1983Daniel L Flamm
exaly
Plasma etching method and plasma etching apparatus
2018KITAGAITO KEIJI +2 more
openaire +4 more sources
Plasma etching: Yesterday, today, and tomorrow
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2013Vincent M. Donnelly
exaly
Computer simulation of a CF4 plasma etching silicon
Journal of Applied Physics, 1984Daniel L Flamm
exaly