Results 241 to 250 of about 27,823 (260)

Plasma etching method and plasma etching apparatus

2014
openaire   +2 more sources

PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING

2017
HUANG LIHUA LI, SHIH HONG, XU LIN, DAUGHERTY JOHN   +3 more
openaire   +1 more source

Plasma Etching

1989
openaire   +1 more source

Plasma Etching

2008
openaire   +1 more source

Plasma etching

2004
openaire   +1 more source

A kinetic study of the plasma‐etching process. II. Probe measurements of electron properties in an rf plasma‐etching reactor

Journal of Applied Physics, 1982
exaly  

Plasma Etching

2015
openaire   +1 more source

Plasma etching

2007
openaire   +1 more source

Plasma etching

2005
SRINIVASAN ANAND, CARLSTROM CARL-FREDRIK, LANDGREN GUNNAR   +2 more
openaire   +1 more source

PLASMA ETCHING

2000
openaire   +1 more source