Results 241 to 250 of about 27,754 (260)

Plasma Etching

2016
openaire   +1 more source

Computer simulation of a CF4plasma etching silicon

Journal of Applied Physics, 1984
Daniel L Flamm, Flamm Daniel L
exaly  

Plasma etching: Yesterday, today, and tomorrow

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2013
Vincent M Donnelly, Vincent M Donnelly A, Donnelly Vincent M   +2 more
exaly  

Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

Nano Today, 2013
B He, Xianfeng Chen, Chun-Sing Lee
exaly  

Plasma Etching

1989
openaire   +1 more source

Plasma beam studies of Si and Al etching mechanisms

Journal of Vacuum Science and Technology, 1982
Smith Donald L
exaly  

Charging effect simulation model used in simulations of plasma etching of silicon

Journal of Applied Physics, 2012
Valentyn Ishchuk, Mike Cooke, Ivo W Rangelow   +2 more
exaly  

Plasma etching of high aspect ratio features in SiO2 using Ar/C4F8/O2 mixtures: A computational investigation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Shuo Huang, Chad M Huard, Seungbo Shim
exaly  

Plasma Etching

2015
openaire   +1 more source

Plasma etching

2007
openaire   +1 more source