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Plasma etching: principles, mechanisms, application to micro- and nano-technologies
Applied Surface Science, 2000Pierre-Yves Tessier +1 more
exaly
Singular Sheet Etching of Graphene with Oxygen Plasma
Nano-Micro Letters, 2014Wen Li, Lixin Dong, Haider Al-Mumen
exaly
Plasma etching gas and plasma etching method
2014ITO AZUMI, YAMAZAKI ATSUYO
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Plasma beam studies of Si and Al etching mechanisms
Journal of Vacuum Science and Technology, 1982Smith Donald L
exaly
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
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