Results 231 to 240 of about 27,754 (260)

Singular Sheet Etching of Graphene with Oxygen Plasma

Nano-Micro Letters, 2014
Haider Al-Mumen, Fubo Rao, Wen Li
exaly  

Plasma Etching

1998
openaire   +1 more source

Microscopic uniformity in plasma etching

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1992
Richard A Gottscho, C W Jürgensen, Gottscho Richard A   +2 more
exaly  

Non‐Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Advanced Materials, 2011
Lauri Sainiemi, Ville Jokinen, Ali Shāh   +2 more
exaly  

Plasma etching behavior of Y2O3 ceramics: Comparative study with Al2O3

Applied Surface Science, 2016
Jin Luo, Ke Wang, Bo-Ping Zhang
exaly  

Plasma etching

2004
openaire   +1 more source

Low‐temperature reactive ion etching and microwave plasma etching of silicon

Applied Physics Letters, 1988
Kazunori Tsujimoto
exaly  

Plasma etching: principles, mechanisms, application to micro- and nano-technologies

Applied Surface Science, 2000
C Cardinaud, Pierre-Yves Tessier
exaly  

Plasma Etching

2008
openaire   +1 more source

Plasma atomic layer etching using conventional plasma equipment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2009
Ankur Agarwal, Mark J Kushner, Agarwal Ankur   +2 more
exaly