Results 231 to 240 of about 27,823 (260)

Plasma etching method and plasma etching apparatus

2018
KITAGAITO KEIJI, KOBAYASHI FUMIYA, TOMURA MAJU   +2 more
openaire   +4 more sources

Plasma Etching

1998
openaire   +1 more source

Selective Etching of Graphene Edges by Hydrogen Plasma

Journal of the American Chemical Society, 2010
, Hongjie Dai, Liying Jiao
exaly  

Cyclical plasma etching

2017
GOODYEAR ANDREW L, COOKE MICHAEL J
openaire   +3 more sources

Low‐temperature reactive ion etching and microwave plasma etching of silicon

Applied Physics Letters, 1988
exaly  

Inductively coupled plasma etching of GaAs in Cl 2 /Ar, Cl 2 /Ar/O 2 chemistries with photoresist mask

Applied Surface Science, 2015
Chao Kang, Xiaomin Ren, Yongqing Huang   +2 more
exaly  

A three‐dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments

Journal of Applied Physics, 1996
Mark Kushner, Kushner Mark J
exaly  

Plasma Etching

2016
openaire   +1 more source

Introduction to ion and plasma etching

Journal of Vacuum Science and Technology, 1976
exaly  

Plasma etching method and plasma etching apparatus

2016
openaire   +2 more sources