Results 251 to 260 of about 27,754 (260)

Basic chemistry and mechanisms of plasma etching

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1983
Daniel L Flamm, Vincent M Donnelly
exaly  

Plasma etching of aluminum

Microelectronics Reliability, 1981
openaire   +1 more source

Plasma Etch Equipment

2023
openaire   +1 more source

Plasma etch processes

2009
openaire   +1 more source

Plasma-Assisted Etching

1991
openaire   +1 more source

Introduction to ion and plasma etching

Journal of Vacuum Science and Technology, 1976
exaly  

Graphene: Plasma Etching

2016
openaire   +1 more source

A kinetic study of the plasma‐etching process. II. Probe measurements of electron properties in an rf plasma‐etching reactor

Journal of Applied Physics, 1982
exaly  

Plasma etching of metals

Microelectronics Reliability, 1987
openaire   +1 more source

Plasma etching in microtechnology

1996
openaire   +1 more source