Results 251 to 260 of about 27,823 (260)

METHOD AND APPARATUS FOR PLASMA ETCHING

1982
SHIBAYAMA HIKOU, OGAWA TETSUYA, KOSUGI MAKOTO, HISATSUGU TOKUSHIGE, KOBAYASHI KOICHI   +4 more
openaire   +2 more sources

Method for plasma etching a workpiece

2018
LAUNAY NICOLAS, VARVARA MAXIME
openaire   +2 more sources

Method for plasma etching of a material.

1987
HENRY, DANIEL, BOSWELL, RODERICK
openaire   +2 more sources

ETCHING METHOD AND PLASMA ETCHING MATERIAL

2019
URABE KEIICHIRO, SHEN PENG, HSU CHIH-YU, STAFFORD NATHAN   +3 more
openaire   +1 more source

PLASMA ETCHING OF DIAMOND SURFACES

2008
LEE CHEE-LEONG, GU ERDAN, SCARSBROOK GEOFFREY ALAN, FRIEL IAN, DAWSON MARTIN DAVID   +4 more
openaire   +8 more sources

ANISOTROPIC SILICON ETCHING IN FLUORINATED PLASMA

1988
CHEN LEE, MATHAD GANGADHARA S
openaire   +3 more sources

Plasma etch process

1994
SALIMIAN SIAMAK, DELFINO MICHELANGELO, CHUNG BU-CHIN   +2 more
openaire   +1 more source

Plasma etching method

2003
SAITO GO, SAKAGUCHI MASAMICHI, KOBAYASHI HITOSHI, YOSHIGAI MOTOHIKO, TANI SATOSHI   +4 more
openaire   +1 more source

Etching methods with alternating non-plasma and plasma etching processes

GUO XIANGYU, STAFFORD NATHAN
openaire   +1 more source

Plasma etching apparatus

1993
openaire   +1 more source