Results 251 to 260 of about 1,458,991 (299)
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Microscopic uniformity in plasma etching Available to Purchase
Journal of Vacuum Science & Technology B, 1992C W Jürgensen, Richard A Gottscho
exaly
Plasma etching gas and plasma etching method
2014ITO AZUMI, YAMAZAKI ATSUYO
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Plasma etching: principles, mechanisms, application to micro- and nano-technologies
Applied Surface Science, 2000Pierre-Yves Tessier +1 more
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Plasma atomic layer etching using conventional plasma equipment Available to Purchase
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2009Mark Kushner
exaly
Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication
Advanced Materials, 2011Ville Jokinen, Sami Franssila, Ali Shah
exaly
Plasma etching method and plasma etching apparatus
2013SATAKE MAKOTO +5 more
openaire +1 more source