Results 321 to 330 of about 2,786,485 (335)

Atomic layer etching of SiO2 by alternating an O2 plasma with fluorocarbon film deposition

, 2017
T. Tsutsumi, H. Kondo, M. Hori, M. Zaitsu, A. Kobayashi, T. Nozawa, N. Kobayashi   +6 more
semanticscholar   +1 more source

Creation of superhydrophobic wood surfaces by plasma etching and thin-film deposition

Surface and Coatings Technology, 2015
Zhenguan Tang, Lu Jiang, Victor Breedveld   +2 more
exaly  

Inductively coupled plasma reactive-ion etching of β-Ga2O3: Comprehensive investigation of plasma chemistry and temperature

, 2017
Amit P. Shah, Arnab Bhattacharya
semanticscholar   +1 more source

Self-terminated etching of GaN with a high selectivity over AlGaN under inductively coupled Cl 2 /N 2 /O 2 plasma with a low-energy ion bombardment

, 2017
Y. Zhong, Yu Zhou, Hongwei Gao, Shujun Dai, Junlei He, M. Feng, Qiang Sun, Jijun Zhang, Yanfei Zhao, An Dingsun, Hui Yang   +10 more
semanticscholar   +1 more source

Plasma-Assisted Etching

1991
openaire   +1 more source

Growth and etching characteristics of (001) β-Ga2O3 by plasma-assisted molecular beam epitaxy

, 2017
Y. Oshima, E. Ahmadi, S. Kaun, Feng Wu, J. Speck   +4 more
semanticscholar   +1 more source

Plasma etch processes

2009
openaire   +1 more source

Alvey supports plasma etching

Microprocessors and Microsystems, 1985
openaire   +1 more source

Low‐temperature reactive ion etching and microwave plasma etching of silicon

Applied Physics Letters, 1988
exaly  

Plasma etching—A discussion of mechanisms

Journal of Vacuum Science and Technology, 1979
exaly