Results 301 to 310 of about 2,786,485 (335)
Some of the next articles are maybe not open access.

Plasma etching: Yesterday, today, and tomorrow

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2013
Vincent M Donnelly
exaly  

An Anisotropic Etching Effect in the Graphene Basal Plane

Advanced Materials, 2010
Rong Yang, Zhiwen Shi, Dongxia Shi
exaly  

4462863 Microwave plasma etching

Vacuum, 1985
Shiger Nishimatsu   +3 more
openaire   +1 more source

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