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Plasma etching: principles, mechanisms, application to micro- and nano-technologies
Applied Surface Science, 2000Christophe Cardinaud +1 more
exaly
Etching of polymers, proteins and bacterial spores by atmospheric pressure DBD plasma in air
, 2017A. Kuzminova +8 more
semanticscholar +1 more source
Surface Phenomena During Plasma-Assisted Atomic Layer Etching of SiO2.
ACS Applied Materials and Interfaces, 2017Ryan J. Gasvoda +4 more
semanticscholar +1 more source

