An All-in-One Testing Chip for the Simultaneous Measurement of Multiple Thermoelectric Parameters in Doped Polysilicon [PDF]
MicromachinesPolysilicon is widely used as a thermoelectric material due to its CMOS compatibility and tunability through doping. The accurate measurement of the thermoelectric parameters—such as the Seebeck coefficient, thermal conductivity, and electrical ...
Lei Shi +6 more
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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis [PDF]
Microsystems & Nanoengineering, 2023 Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-
Avisek Roy +3 more
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Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications [PDF]
MicromachinesThe development of low-temperature piezoresistive materials provides compatibility with standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such material in flexible substrates, thereby expanding the potential for ...
Filipa C. Mota +9 more
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Micromachines, 2023 When AlN thin films are deposited directly on the high-resistance silicon (HR-Si) substrate, a conductive layer will be formed on the HR-Si surface. This phenomenon is called the parasitic surface conduction (PSC) effect.
Tian Xu +7 more
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Optical Temperature Sensor Based on Polysilicon Waveguides
Sensors, 2022 Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs.
Xinru Xu +8 more
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Impact of Crosstalk into High Resistivity Silicon Substrate on the RF Performance of SOI MOSFET
Journal of Telecommunications and Information Technology, 2023 Crosstalk propagation through silicon substrate is a serious limiting factor on the performance of the RF devices and circuits. In this work, substrate crosstalk into high resistivity silicon substrate is experimentally analyzed and the impact on the RF
Khaled Ben Ali +2 more
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MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
Micromachines, 2023 Polycrystalline silicon is a brittle material, and its strength results are stochastically linked to microscale (or even nanoscale) defects, possibly dependent on the grain size and morphology. In this paper, we focus on the out-of-plane tensile strength
Tiago Vicentini Ferreira do Valle +6 more
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Modeling and random search optimization for the polysilicon CVD reactor
Results in Control and Optimization, 2023 Polysilicon is mainly obtained by the Siemens process chemical vapor deposition (CVD) reaction, in which hydrogen gas and trichlorosilane (TCS) are fed into the CVD reactor to produce polysilicon.
Bangwen Xi +7 more
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Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
Advances in Condensed Matter Physics, 2015 With the rapid development of the power integrated circuit technology, polysilicon resistors have been widely used not only in traditional CMOS circuits, but also in the high voltage applications.
Xiao-Yu Tang, Ke Dong
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Proceedings, 2017 This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films.
Ian Chuang, Aron Michael, Chee Yee Kwok
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