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Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate
Sensors and Actuators A: Physical, 2000exaly
Selective polysilicon growth for deep trench polysilicon isolation structure
2023CHENG YU-HUNG +4 more
openaire +2 more sources
DRAM process with improved polysilicon-to-polysilicon capacitor and the capacitor
1990COLEMAN DONALD J, HAKEN ROGER A
openaire +2 more sources
A Study of Creep in Polysilicon MEMS Devices
Journal of Engineering Materials and Technology, Transactions of the ASME, 2005exaly