Results 61 to 70 of about 1,972 (161)
Disclosing the Polysilicon Deposition Process
The chemical route for producing hyperpure silicon, referred to as polysilicon, is energy intensive. In this work two paths are analysed to reduce energy consumption during polysilicon deposition: reduce power loss and increase polysilicon productivity.
Gonzalo del Coso, Gonzalo +2 more
openaire +2 more sources
Selective formation of tungsten nanowires
We report on a process for fabricating self-aligned tungsten (W) nanowires with polycrystalline silicon core. Tungsten nanowires as thin as 10 nm were formed by utilizing polysilicon sidewall transfer technology followed by selective deposition of ...
Bien Daniel +3 more
doaj
This study identifies a novel failure mode in silicon dioxide/silicon nitride (SiO₂/Si₃N₄) capacitors caused by dopant diffusion in heavily doped polysilicon substrates.
Shuo Wang +7 more
doaj +1 more source
The adsorptive-kinetic model of in-situ phosphorus doped film polysilicon deposition process [PDF]
The investigation of deposition kinetics of in-situ phosphorus doped polysilicon films has been performed. The adsorptive-kinetic model of in-situ phosphorus doped polysilicon deposition has been developed.
Nalivaiko O. Yu., Turtsevich A. S.
doaj +2 more sources
In this work a simplified low-frequency resonant method for the measurement of Young’s modulus of polysilicon cantilevers is described. We used a test chip, specially designed for characterizing thermal and mechanical properties, and fabricated using a ...
F.J. Quiñones-N +5 more
doaj +1 more source
Microstructure for Thermal Impedance Spectroscopy for Biofuel Composition Measurement
Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels.
Bo Jiang +4 more
doaj +1 more source
Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach
Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation ...
Stefano Mariani +3 more
doaj +1 more source
The increasing penetration of renewable energy introduces significant uncertainty to the operation of energy-intensive industries. To address this challenge, we propose a multi-timescale scheduling model for wind power integration in polysilicon ...
Yulong Yang +4 more
doaj +1 more source
With triboelectric nanogenerators (TENGs) introduced in 2012, they have emerged in the fields of flexible wearable electronics, portable energy, Internet of Things (IoTs), and biomedicine by virtue of their lightweight, high‐energy conversion, low cost ...
Xichen Yin +6 more
doaj +1 more source
In this paper, we present a comprehensive two-dimensional simulation program designed to model the intricate electrical characteristics of reverse-biased lateral polysilicon PIN diodes.
Abdelaziz Rabehi +4 more
doaj +1 more source

