Results 141 to 148 of about 55,048 (148)
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Magnetic field enhanced reactive ion etching

Microelectronics Reliability, 1985
openaire   +1 more source

Reactive ion etching in chlorinated plasmas

Microelectronics Reliability, 1981
openaire   +1 more source

Silicon etching in hydrogen bromide reactive ion etching plasmas

Proceedings - Electrochemical Society, 1990
Bestwick, T.D.   +4 more
openaire   +1 more source

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