Results 131 to 140 of about 16,783 (158)

Superhydrophobic silicon surfaces with micro–nano hierarchical structures via deep reactive ion etching and galvanic etching

Journal of Colloid and Interface Science, 2011
Yang He, Chengyu Jiang, Weizheng Yuan
exaly  

Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Advanced Materials, 2018
Tony X Zhou, Rainer Stöhr, Amir Yacoby   +2 more
exaly  

Reactive ion etching of silicon

Vacuum, 1980
openaire   +1 more source

Reactive Ion Etching (RIE)

2008
Sami Franssila, Lauri Sainiemi
openaire   +1 more source

A shock‐tracking algorithm for surface evolution under reactive‐ion etching

Journal of Applied Physics, 1993
S Hamaguchi, M Dalvie, R T Farouki
exaly  

Molecular dynamics simulation of Si and SiO2 reactive ion etching by fluorine-rich ion species

Surface and Coatings Technology, 2019
Erin Joy Capdos Tinacba, Michiro Isobe, Kazuhiro Karahashi   +2 more
exaly  

Change in surface morphology of polytetrafluoroethylene by reactive ion etching

Radiation Physics and Chemistry, 2011
Tomohiro Takahashi, Yuki Hirano, Akihiro Oshima   +2 more
exaly  

Low‐temperature reactive ion etching and microwave plasma etching of silicon

Applied Physics Letters, 1988
Kazunori Tsujimoto
exaly  

Reactive ion etching of novel materials—GaN and SiC

Vacuum, 2003
J Szmidt, A Werbowy
exaly  

Selective reactive ion etching of GaAs on AlGaAs using CCl2F2 and He

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1988
Aｌan Seabaugh
exaly