Results 141 to 150 of about 16,783 (158)
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Reactive ion etching of CVD-diamond for piezoresistive pressure sensors

Diamond and Related Materials, 2002
U Hilleringmann
exaly  

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Sensors and Actuators A: Physical, 1996
Joseph Brown, Gregory T A Kovacs
exaly  

Conductance considerations in the reactive ion etching of high aspect ratio features

Applied Physics Letters, 1989
J W Coburn, Harold F Winters, Coburn J W
exaly  

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