Results 141 to 150 of about 16,783 (158)
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Reactive ion etching of CVD-diamond for piezoresistive pressure sensors
Diamond and Related Materials, 2002U Hilleringmann
exaly
Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures
Sensors and Actuators A: Physical, 1996Joseph Brown, Gregory T A Kovacs
exaly
Conductance considerations in the reactive ion etching of high aspect ratio features
Applied Physics Letters, 1989J W Coburn, Harold F Winters, Coburn J W
exaly

