Results 181 to 190 of about 590 (212)

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Journal of Optical Microsystems, 2021
Stefan Sinzinger, Edda Radlein, Meike Hofmann   +2 more
exaly  

Reactive Ion Etching of X-Cut LiNbO3 in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide

Applied Sciences (Switzerland), 2023
VÍCTOR Krishtop, Alexander Syuy
exaly  

Smooth and high-rate reactive ion etching of diamond

Diamond and Related Materials, 2002
Yoshiki Nishibayashi, Koji Kobashi, Kenjiro Oura   +2 more
exaly  

Sheath collision processes controlling the energy and directionality of surface bombardment in O2reactive ion etching

Journal of Applied Physics, 1988
Jürgensen C W
exaly  

A shock‐tracking algorithm for surface evolution under reactive‐ion etching

Journal of Applied Physics, 1993
Hamaguchi S
exaly  

Reactive ion etching of silicon

Vacuum, 1980
openaire   +1 more source

Molecular dynamics simulation of Si and SiO2 reactive ion etching by fluorine-rich ion species

Surface and Coatings Technology, 2019
Satoshi Hamaguchi, Kazuhiro Karahashi, Erin Joy Capdos Tinacba   +2 more
exaly  

Reactive ion etching of CVD-diamond for piezoresistive pressure sensors

Diamond and Related Materials, 2002
U Hilleringmann
exaly  

Selective reactive ion etching of GaAs on AlGaAs using CCl2F2 and He

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1988
Alan Seabaugh, Seabaugh Alan
exaly  

Reactive ion etching of novel materials—GaN and SiC

Vacuum, 2003
A Werbowy
exaly