Results 201 to 210 of about 590 (212)

Reactive ion etching of aluminum

1976
HARVILCHUCK JOSEPH M, LOGAN JOSEPH S, METZGER WILLIAM C, SCHAIBLE PAUL M   +3 more
openaire   +1 more source

Reactive Ion Etching (RIE)

2011
openaire   +1 more source

Plasma and Reactive Ion Etching

2001
openaire   +1 more source

Reactive ion etching device

1995
OHMI TADAHIRO, KASAMA YASUHIKO, FUKUI HIROBUMI   +2 more
openaire   +1 more source

REACTIVE ION ETCHING METHOD

1987
YOSHIDA, YUKIMASA C/O PATENT DIVISION, WATANABE, TOHRU C/O PATENT DIVISION   +1 more
openaire   +2 more sources

METHOD FOR REACTIVE ION ETCHING OF AN ELEMENT

1979
openaire   +2 more sources

Reactive ion etching

1981
openaire   +1 more source

REACTIVE ION ETCHING

1992
openaire   +1 more source

REACTIVE ION ETCHING APPARATUS

1990
KOSHIBA, MITSUNOBU, YAMADA, KEIICHI, HARITA, YOSHIYUKI, KAWAMURA, SHIN'ICHI, FURUTO, YUUJI   +4 more
openaire   +1 more source

A REACTIVE ION ETCHING PROCESS

2000
RUANO-LOPEZ JESUS MIGUEL, BONAR JAMES RONALD, MCLAUGHLIN ANDREW JAMES, DA SILVA MARQUES PAULO VICENTE, JUBBER MICHAEL GEORGE, WILKINSON CHRISTOPHER D W, AITCHISON JAMES STEWART   +6 more
openaire   +1 more source