Results 211 to 212 of about 590 (212)
Some of the next articles are maybe not open access.
Deep Reactive Ion Silicon Etching
2011
openaire
copy doi
(10.1007/springerreference_66535)
openaccessbutton.org (pdf)
+1 more source
DRIE (Deep Reactive Ion Etching)
2008
openaire
copy doi
(10.1007/978-0-387-48998-8_353)
openaccessbutton.org (pdf)
+1 more source
7. clean energy
physics
etching
deep reactive ion etching
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