TiO2/CuO/Cu2O Photovoltaic Nanostructures Prepared by DC Reactive Magnetron Sputtering [PDF]
In this study, titanium dioxide/copper oxide thin-film solar cells were prepared using the reactive direct-current magnetron sputtering technique.
Grzegorz Wisz +9 more
doaj +2 more sources
Antimony Selenide Solar Cells Fabricated by Hybrid Reactive Magnetron Sputtering [PDF]
The fabrication of Sb2Se3 thin-film solar cells deposited by a pulsed hybrid reactive magnetron sputtering (PHRMS) was proposed and examined for different growth conditions. The influence of growth temperature and Se pulse period were studied in terms of
Daniel Brito +10 more
doaj +2 more sources
Modeling reactive magnetron sputtering: Opportunities and challenges [PDF]
Abstract The complexity of the reactive magnetron sputtering process is demonstrated by four simulation examples. The examples, commonly encountered during the application of this process for thin film deposition, are described by a numerical model for reactive sputter deposition.
D Depla, K Strijckmans, R Schelfhout
exaly +3 more sources
SYSTEM OF STABILIZATION OF REACTIVE MAGNETRON SPUTTERING PROCESS
Film coatings today allow to create large number of diverse structures in electronics, microelectronics, optics, architecture and construction. Leading technologies in this area are magnetron deposition technologies.
A. P. Burmakou +2 more
doaj +3 more sources
Effect of Bias Voltage on the Crystal Growth of AlN(002) Thin Films Fabricated by Reactive Magnetron Sputtering [PDF]
The study investigates the influence of bias voltage on the structural and morphological properties of aluminum nitride AlN (002) thin films deposited on sapphire substrates via reactive magnetron sputtering for high-frequency surface acoustic wave (SAW)
Yong Du +3 more
doaj +2 more sources
Electrical and optical properties of the WOx thin films, prepared by magnetron sputtering, and analysis of their highest value [PDF]
In this article, optical and electrical properties of tungsten oxide thin films, prepared by magnetron sputtering in the atmosphere of various oxygen content, were analysed.
Julia Dybała, Michał Mazur
doaj +1 more source
Model of Reactive Magnetron Sputtering of a Two-Component Composite Target
The article proposes a model for predicting the content of metal components of complex oxide films deposited by reactive magnetron sputtering of a two-component composite target in Ar/O2 gas mixture.
H. T. Doan +5 more
doaj +1 more source
Study on photoelectricity properties of SiCN thin films prepared by magnetron sputtering
SiCN thin film is one of the most attractive silicon-based materials due to its excellent electrical, mechanical and optical properties. In this study, SiCN thin films have been prepared by the radio frequency reactive magnetron sputtering method under ...
Qiang Li +11 more
doaj +1 more source
DEPOSITION OF THE STOICHIOMETRIC COATINGS BY REACTIVE MAGNETRON SPUTTERING
DEPOSITION OF THE STOICHIOMETRIC COATINGS BY REACTIVEMAGNETRON SPUTTERINGThe investigations of the reactive magnetron depositing of the stoichiometric coatings “metal-metalloid”were done. The dependences between sputtering parameters of a target and processes of plasmo-chemical formation on the surface of sample “metal-metalloid” and formations of ...
Vlad Sagalovich +2 more
openaire +4 more sources
Adopting magnetron sputtering continuous automatic production line equipment for industrial production, polyester fabrics as the substrates were coated with nano-Ag/TiO 2 composite films prepared by direct current sputtering method and direct current ...
Xiaohong Yuan +5 more
doaj +1 more source

