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Yttrium-doped TiO2 films prepared by means of DC reactive magnetron sputtering
Chemical Engineering Journal, 2009Shenglong Zhu
exaly
Reactive multitarget magnetron sputtering of Sr2FeMoO6 films
Advances in Optical Thin Films VIIIIgnas Bitinaitis +5 more
openaire +1 more source
Control of reactive high power impulse magnetron sputtering processes
Surface and Coatings Technology, 2010exaly
Optical diagnostics during reactive magnetron sputtering
2008Konstantinidis, Stéphanos +4 more
openaire +1 more source