Results 301 to 308 of about 22,223 (308)

Recent aspects concerning DC reactive magnetron sputtering of thin films: a review

Surface and Coatings Technology, 2000
exaly  

The deposition of aluminium oxide coatings by reactive unbalanced magnetron sputtering

Surface and Coatings Technology, 1996
P J Kelly, R D Arnell
exaly  

AC and RF Reactive Sputtering

2018
Grant O Este, William D Westwood
openaire   +1 more source

Cermet resistors by reactive sputtering

Microelectronics Reliability, 1967
openaire   +1 more source

Reactive magnetron sputtering on glass

Thin Solid Films, 1981
openaire   +1 more source

High‐rate aluminum oxide deposition by MetaModeTM reactive sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992
exaly  

Influence of the plasma on substrate heating during low‐frequency reactive sputtering of AIN

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1993
exaly  

Properties of reactive sputtered TiW

Microelectronics Reliability, 1987
openaire   +1 more source