Wafer-Level Packaging Method for RF MEMS Applications Using Pre-Patterned BCB Polymer. [PDF]
Gong Z, Zhang Y, Guo X, Liu Z.
europepmc +1 more source
Nanocrystalline diamond for RF-MEMS applications
S. Balachandran +6 more
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Introduction to MEMS and RF-MEMS: from the early days of microsystems to modern RF-MEMS passives [PDF]
openaire +1 more source
MEMS vapor cells-based Rydberg-atom electrometry toward miniaturization and high sensitivity. [PDF]
Ma Y +9 more
europepmc +1 more source
Cryogenic performance evaluation of commercial SP4T microelectromechanical switch for quantum computing applications. [PDF]
Lee YB +5 more
europepmc +1 more source
Tesla-scale magnetic field measurement based on Sideband-overlap Zeeman spectroscopy using a functionalized MEMS vapor cell. [PDF]
Guo J +8 more
europepmc +1 more source
Design of MEMS Gas Sensors and Integration for Multiple Gas Classification for Lithium-Ion Battery Thermal Runaway Warning. [PDF]
Liu H +7 more
europepmc +1 more source
Wirelessly Interrogated, Implantable Capacitive MEMS Sensors for Continuous Intraocular Pressure Monitoring. [PDF]
Li L, Zaman A, Ayyala R, Wang J.
europepmc +1 more source
Assessment of machine learning models for predicting the deflection of concrete beams. [PDF]
Sivasuriyan A +6 more
europepmc +1 more source

