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Terahertz MEMS actuators and applications. [PDF]

open access: yesMicrosyst Nanoeng
Wang Z   +13 more
europepmc   +1 more source

A review of glass thermal reflow: method, device, and applications. [PDF]

open access: yesMicrosyst Nanoeng
Zhu M   +13 more
europepmc   +1 more source
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RF MEMS devices

Proceedings International Conference on MEMS, NANO and Smart Systems, 2004
This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS multiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate ...
Raafat R. Mansour   +3 more
openaire   +1 more source

A tunable RF MEMS inductor

Proceedings. 2004 International Conference on MEMS, NANO and Smart Systems, 2004. ICMENS 2004., 2004
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Imed Zine-El-Abidine   +2 more
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RF MEMS waveguide switch

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004
In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In
M. Daneshmand, R.R. Mansour, N. Sarkar
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Tuning in to RF MEMS

IEEE Microwave Magazine, 2009
RF MEMS technology was initially developed as a replacement for GaAs HEMT switches and p-i-n diodes for low-loss switching networks and X-band to mm-wave phase shifters. However, we have found that its very low loss properties (high device Q), its simple microwave circuit model and zero power consumption, its high power (voltage/current) handling ...
Gabriel Rebeiz   +6 more
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RF MEMS roadmap

2007 European Microwave Conference, 2007
This document summarizes the results of the RF MEMS roadmapping project ARRRO (Applied Research Roadmap for Micro and Nano Systems). This project has been financed by the European Commission within the 6th Framework Programme. The paper will present some excerpts of the project regarding the 1) RF MEMS product roadmap with the example of RF MEMS ...
Jeremie Bouchaud   +4 more
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