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Linearity and RF Power Handling of Capacitive RF MEMS Switches

2019 IEEE MTT-S International Microwave Symposium (IMS), 2019
Linearity characteristics of capacitive tuners under large radio frequency (RF) power have become an important issue for today’s cellphone industry. The use of these devices as antenna tuners has become critically important due to the RF spectrum opening in the low-frequency range.
David Molinero   +3 more
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RF MEMS Switch ASICS

2007 Asia-Pacific Microwave Conference, 2007
This paper describes the combination of a novel "device on package" MEMS fabrication architecture and proven high force disk actuator technology to enable new families of MEMS Switch ASIC's (Application Specific Integrated Circuits). This includes both custom high performance MEMS switches and MEMS switches integrated with passive components.
openaire   +1 more source

Design optimization of RF MEMS SP4T and SP6T switch

2009 International Semiconductor Conference, 2009
In this paper, improved RF MEMS SP4T and SP6T switches using a new design and layout topology, having significant impact on the RF characteristics of the device are presented. The device takes advantage of the CPW transmission line with small width and spacing configured for 50Ω line impedance in ohmiccontact SPST switch.
Sangita C. Roy, Kamal Jit Rangra
openaire   +1 more source

RF MEMS Switch with Enhanced Reliability

2018 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT), 2018
In this paper, a novel RF MEMS shunt switch with enhanced reliability is presented. A Ka-band shunt switch which is fabricated on a high resistivity silicon substrate implements a novel concept of tri-layer sandwich (insulator-Metal-insulator) membrane which results a lower actuation voltage of 10 Volt.
Vishal Kumar, S K Koul, Ananjan Basu
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Miniature RF MEMS switch matrices

2009 IEEE MTT-S International Microwave Symposium Digest, 2009
A novel miniature-size switching unit is reported for application as the building block of multiport switch matrices. The cell consists of 3 cantilever-beam contact type MEMS devices coupled to CPW transmission lines. A major feature of the proposed switch cell is that in each of the operating states there is only one MEMS switch located in the path of
A. A. Fomani, R. R. Mansour
openaire   +1 more source

RF-MEMS switches for reconfigurable integrated circuits

IEEE Transactions on Microwave Theory and Techniques, 1998
This paper deals with a relatively new area of radio-frequency (RF) technology based on microelectro-mechanical systems (MEMS). RF MEMS provides a class of new devices and components which display superior high-frequency performance relative to conventional (usually semiconductor) devices, and which enable new system capabilities.
openaire   +2 more sources

RF MEMS Switch and Its Applications

ECS Transactions, 2012
RF MEMS (Radio Frequency Microelectromechanical System) has seen an amazing growth in the past 20 years. It has immense commercial and defense potential due to its low loss, low power consumption and superior RF performances. In this article, RF MEMS and its applications are reviewed.
Zewen Liu, Ling Li
openaire   +1 more source

Miniature MEMS Switches for RF Applications

Journal of Microelectromechanical Systems, 2011
This paper presents a new way to design MEMS (microelectromechanical system) metal contact switches for RF applications using miniature MEMS cantilevers. A single 25 × 25 μm switch is first demonstrated with a Au-to-Ru contact, Cu = 5 fF and Ron = 7 Ω at an actuation voltage of 55 V. The measured switching time is 2.2 μs and the release time is
Stefanini, Romain   +3 more
openaire   +2 more sources

Micro/Nanotribology of RF MEMS Switches

ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 2004
Microelectromechanical systems (MEMS) radio frequency (RF) switches hold great promise in a myriad of commercial, aerospace, and military applications. MEMS switches offer important advantages over current electromechanical and solid state technologies including high linearity, low insertion loss, low power consumption, good isolation, and low cost [1 ...
Steven T. Patton   +2 more
openaire   +1 more source

Development and optimization of RF MEMS switch

Microsystem Technologies, 2019
Isolation and actuation voltages are important parameters in micro-electro-mechanical switches. These parameters can be destroyed by the effect of creating bulge and erosion in the surface of the beam. In this paper, a fabrication method is proposed to create a smooth and flat beam.
Yasser Mafinejad   +2 more
openaire   +1 more source

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