Results 161 to 170 of about 509,762 (201)

Quantitative Measurement of Electromagnetic Distortions in Scanning Electron Microscope (SEM)

2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007, 2007
Image deformations caused by electromagnetic interference (EMI) are ones of the most frequent undesirable effects in practical scanning electron microscopy. They usually appear, even although the place chosen for a microscope system fulfills EMI conditions, as periodic deformation of vertical edges of an observed specimen.
Mariusz Pluska, Lukasz Oskwarek, Remigiusz Rak, Andrzej Czerwinski   +3 more
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Scanning Electron Microscope (Sem) Dimensional Measurement Tool

SPIE Proceedings, 1986
Requirements for measurement of very small integrated circuit (IC) device structures have become increasingly more demanding with the advent of electron beam, x-ray and advanced optical lithographic processes. High throughput, highly accurate and repeatable measurement tools are needed to guarantee dimensional control for device performance. This paper
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DURIP 00 Scanning Electron Microscope (SEM)

2001
Abstract : Upon completion of the installation, work proceeded in making the new Scanning Electron Microscope available for remote operation via the Internet. This has been accomplished and demonstrations were given to local High School Science teachers.
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A Working Method for Adapting the (SEM) Scanning Electron Microscope to Produce (STEM) Scanning Transmission Electron Microscope Images

International Symposium for Testing and Failure Analysis, 2002
Abstract This paper describes the problems encountered and solutions found to the practical objective of developing an imaging technique that would produce a more detailed analysis of IC material structures then a scanning electron microscope.
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Noise Contributions To Feature Dimension Measurement In A Scanning Electron Microscope (Sem)

SPIE Proceedings, 1987
In the semiconductor field critical dimension (CD) measurement accuracies and repeat-abilities of 1% @ 3siqma are often required and supplied by instrument vendors. In a SEM the accuracy and repeatability of such measurements is related to the signal-to-noise (s/n) ratio of the signal carrying the topographical information of the feature. Noise sources
Jon R. Pearce, Duane C. Holmes
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Remote Operation of a Scanning Electron Microscope (SEM) from Distant Classrooms

Proceedings, annual meeting, Electron Microscopy Society of America, 1996
California State University, Hayward (CSUH) has successfully demonstrated remote operation of a scanning electron microscope (SEM) using several networking interfaces. One of these methods is the use of highbandwidth asynchronous transfer mode (ATM). The different networking schemes have made it possible for instructors and researchers to access and ...
N. R. Smith, R. E. Tullis, N. Fegan, C. L. Morgan   +3 more
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Scanning Electron Microscope (SEM)

2023
Ch Sateesh Kumar, M. Muralidhar Singh, Ram Krishna   +2 more
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Direct lifetime measurements in semiconductors with the scanning electron microscope (SEM)

Kristall und Technik, 1981
AbstractThis paper presents a new SEM technique for direct lifetime measurements. The Electron Beam Induced Current (EBIC) has been measured after removal of the electron beam in a SEM. The experiment has been performed for a silicon diode structure. A theoretical model has been given.
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XY table and tilting stage for scanning electron microscope (SEM)

Review of Scientific Instruments, 1975
This paper describes a low−vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.
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STEM (Scanning Transmission Electron Microscopy) in a SEM (Scanning Electron Microscope) for Failure Analysis and Metrology

International Symposium for Testing and Failure Analysis, 2002
Abstract Recent developments in transmission electron microscopy (TEM) sample preparation have greatly reduced the time and cost for preparing thin samples. In this paper, a method is demonstrated for viewing thin samples in transmission in an unmodified scanning electron microscope (SEM) using an easily constructed sample holder ...
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