Results 241 to 250 of about 4,075,667 (324)
Real-Time Quantum Vacuum Control in a Photonic Integrated Circuit
Wang Y +7 more
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On the design of piezoelectric actuator for 1D MEMS scanning mirror applications
Journal of Micromechanics and Microengineering, 2023This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems (MEMS) piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoMs)
Shih-Chi Liu +8 more
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Design and Characterization of a CMOS Electromagnetic Scanning Mirror for LiDAR Applications
IEEE Sensors Letters, 2022This letter presents a dual-axis electromagnetically-driven piezoresistive sensed scanning mirror fabricated in a 0.35-μm complementary metal–oxide semiconductor (CMOS) process. The fabricated structure is 60 μm thick and contains a 3-mm diameter mirror.
Hsin-Yi Lee +2 more
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Compact tomographic near-eye display using a MEMS scanning mirror.
Optics Letters, 2021We propose a compact tomographic near-eye display by combining a micro-electro-mechanical systems (MEMS) scanning mirror device, focus tunable lens, and a single light-emitting diode source. A holographic optical element was used to elaborately focus the
Minkwan Kim +4 more
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A Micromachined Water-Immersible Scanning Mirror Using BoPET Hinges
Sensors and Actuators A: Physical, 2019 This paper reports a new micromachined two-axis water-immersible scanning mirror using BoPET (biaxially-oriented polyethylene terephthalate) hinges. A new fabrication process based on deep plasma etching on a hybrid silicon-BoPET substrate was developed ...
Shuangliang Li
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IEEE/LEOS International Conference on Optical MEMS, 2022
We have successfully realized the MEMS mirror which can scan the wide optical angle of over 100 degrees at the driving frequency of 58 kHz by applying the secondary resonance mode driving design and the new stress dispersion structure to our “Double ...
Kensuke Mihara +4 more
semanticscholar +1 more source
We have successfully realized the MEMS mirror which can scan the wide optical angle of over 100 degrees at the driving frequency of 58 kHz by applying the secondary resonance mode driving design and the new stress dispersion structure to our “Double ...
Kensuke Mihara +4 more
semanticscholar +1 more source
Embedded Control of Scanning Mirror
2021 IEEE 7th International Conference on Control Science and Systems Engineering (ICCSSE), 2021This paper proposed an innovative real-time embedded control system for satellite scanning mirror mechanism. The mechanism element was assembled with two supporting pivots on the axis with an angular sensor and a voice motor accurate. The control precision of the scanning mirror is stringent in space remote target detection, at the same time angle ...
Cui Chenpeng, Jiu Yuanwei, Wang Chun
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Optics Letters, 2020
The conventional photoacoustic microscopy (PAM) system allows trade-offs between lateral resolution and imaging depth, limiting its applications in biological imaging in vivo. Here we present an integrated optical-resolution (OR) and acoustic-resolution (
Chen Zhang +12 more
semanticscholar +1 more source
The conventional photoacoustic microscopy (PAM) system allows trade-offs between lateral resolution and imaging depth, limiting its applications in biological imaging in vivo. Here we present an integrated optical-resolution (OR) and acoustic-resolution (
Chen Zhang +12 more
semanticscholar +1 more source
A Closed-Loop Controlled CMOS MEMS Biaxial Scanning Mirror for Projection Displays
IEEE Sensors Journal, 2020This work presents a biaxial electromag- netically-driven piezoresistively sensed scanning mirror fabricated in a CMOS (complementary metal oxide semiconductor) process.
Cho-Chuan Tsai +3 more
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