Results 151 to 160 of about 1,828 (206)

Resist trimming etch process control using dynamic scatterometry

Microelectronic Engineering, 2009
International audienceDynamic scatterometry is an optical metrology technique designed for the in-situ real time process control in the production of microelectronics devices.
Mohamed El Kodadi, P Schiavone
exaly   +2 more sources

Some of the next articles are maybe not open access.

Related searches:

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

SPIE Proceedings, 2014
Scatterometry is a common tool for the dimensional characterization of periodic nanostructures. In this paper we compare measurement results of two different scatterometric methods: a goniometric DUV scatterometer and a coherent scanning Fourier scatterometer.
J. Endres, N. Kumar, P. Petrik, M. -. Henn, S. Heidenreich, S. F. Pereira, H. P. Urbach, B. Bodermann   +7 more
openaire   +1 more source

Phase-modulation scatterometry

Applied Optics, 2002
Phase-modulation scatterometry is a metrology technique for determining, by means of a phase modulator as a key device, the parameters of gratings. The main source of error to be dealt with are the fluctuations of the phase-modulation amplitude. The grating zeroth-order reflectance modulated by the phase modulator is converted into a signal by the ...
openaire   +2 more sources

Depolarization in microwave scatterometry

IGARSS '96. 1996 International Geoscience and Remote Sensing Symposium, 2002
Recent observations of microwave backscatter from breaking gravity waves indicate that the cross-polarized signals (HV and VH) are much larger than expected from theoretical predictions derived using perturbative methods. Experiments have been conducted to specifically examine the depolarization effects of scattering from breaking waves which give rise
P.H.Y. Lee, J.D. Barter, K.L. Beach, B.M. Lake, H. Rungaldier, J.C. Shelton, H.R. Thompson, R. Yee   +7 more
openaire   +1 more source

Compensation of Faraday Rotation in Multipolarization Scatterometry

IEEE Transactions on Geoscience and Remote Sensing, 2008
The effects of Faraday rotation on spaceborne polarimetric scatterometers are discussed. A method of exploiting an estimate of the Faraday rotation angle to retrieve co-cross polarization is outlined.
Mark Frankford, Joel T. Johnson
openaire   +3 more sources

Specular spectroscopic scatterometry

IEEE Transactions on Semiconductor Manufacturing, 2001
Scatterometry is one of the few metrology candidates that has true in situ/in-line potential for deep submicrometer critical dimension (CD) and profile analysis. Most existing scatterometers are designed to measure multiple incident angles at a single wavelength on periodic gratings. We extend this idea by deploying specular spectroscopic scatterometry.
null Xinhui Niu, N. Jakatdar, null Junwei Bao, C.J. Spanos   +3 more
openaire   +1 more source

Effect of precipitation on ocean wind scatterometry

IEEE International IEEE International IEEE International Geoscience and Remote Sensing Symposium, 2004. IGARSS '04. Proceedings. 2004, 2004
This paper presents preliminary results of precipitation effect on microwave scatterometry wind estimates at C and Ku band. The results show that microwave scatterometer underestimates the wind speed by up to 10 m/s for rain rate condition of 15 mm/hr and wind speed condition of 25 to 30 m/s for both frequency ...
Jilong Yang, Xuehu Zhang, Xiuwan Chen, Yinghai Ke, Daniel Esteban-Fernandez, James R. Carswell, Stephen J. Frasier, David J. McLaughlin, Paul S. Chang, Peter G. Black, Frank D. Marks   +10 more
openaire   +1 more source

Corneal topography, ultrasound biomicroscopy, and scatterometry

Current Opinion in Ophthalmology, 1996
This paper presents a review of corneal topography, including history, literature, physics and technology, data analysis, and recent advances in the field. Clinical applications are also discussed and include contact lens fitting, diagnosis of keratoconus, and refractive surgery.
D, Azar, M, Salvat, A, Benson
openaire   +2 more sources

Mathematical analyses of inverse scatterometry

SPIE Proceedings, 2002
Optical scatterometry has been proven to be a useful tool for the inspection and assessment of lithographic processes. The characteristic signature of the scattergram provides information about the surface relief profile and can be rapidly and non-invasively acquired.
Emmanuel M. Drege, Rayan M. Al-Assaad, Dale M. Byrne   +2 more
openaire   +1 more source

Sea Scatterometry

2006
This paper deals with the sea scatterometry, i.e. with the physical principles and techniques which permit to a scatterometer to perform radar measurements such as to allow the sea surface wind field retrieval. The paper aims at providing the necessary overview of the problem in question thus describing the fundamentals governing the physics of the ...
openaire   +2 more sources