Results 171 to 180 of about 1,828 (206)

Multistatic Scatterometry

International Geoscience and Remote Sensing Symposium, 'Remote Sensing: Moving Toward the 21st Century'., 1988
C.D. Hall, R.A. Cordey
openaire   +1 more source

Scatterometry

2018
Matteo Calaon, Morten Hannibal Madsen, Richard Leach   +2 more
openaire   +1 more source

Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

Sensors, 2021
Piotr Koruba, Michał Ćwikła, Jacek Reiner   +2 more
exaly  

Comparison of Scatterometry, Imaging Scatterometry, AFM and Confocal Microscopy

4M/IWMF2016 The Global Conference on Micro Manufacture : Incorporating the 11th International Conference on Multi-Material Micro Manufacture (4M) and the 10th International Workshop on Microfactories (IWMF), 2016
M. H. Madsen, J. S. Madsen, P. E. Hansen, P. Boher, J. Nygård, D. Dwarakanath, J. F. Jørgensen   +6 more
openaire   +1 more source

Scatterometry

2015
openaire   +1 more source

A combination of library search and Levenberg-Marquardt algorithm in optical scatterometry

Thin Solid Films, 2023
Shiyuan Liu, Chuanwei Zhang, Yating Shi
exaly  

BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS

International Journal for Uncertainty Quantification, 2015
Markus Bär, Sebastian Heidenreich, Hermann Gross   +2 more
exaly  

Optical Scatterometry

1992
JOHN R. MCNEIL, S.S.H. NAQVI, S.M. GASPAR, K.C. HICKMAN, S.D. WILSON   +4 more
openaire   +1 more source

UV scatterometry

SPIE Proceedings, 2003
openaire   +1 more source

Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry

Microelectronic Engineering, 2009
Wolfgang Osten, Thomas Schuster
exaly