Results 201 to 206 of about 1,828 (206)

Focus measurements using scatterometry metrology

2015
EL KODADI MOHAMMED, AMIR NURIEL, VOLKOVICH ROIE, LEVINSKI VLADIMIR, FELER YOEL, KANDEL DANIEL, GUTMAN NADAV, PANDEV STILIAN, SANKO DZMITRY   +8 more
openaire   +2 more sources

Scatterometry for junction metrology

2005
openaire   +1 more source

Scatterometry alignment for imprint lithography

2006
WATTS MICHAEL P C, MCMACKIN IAN
openaire   +1 more source

Scatterometry

exaly  

Scatterometry by phase sensitive reflectometer

2006
openaire   +2 more sources

Scanning scatterometry overlay metrology

MANASSEN AMNON, HILL ANDREW V, PASKOVER YURI, GDOR ITAY, VAKNIN YONATAN, LUBASHEVSKY YUVAL   +5 more
openaire   +1 more source