Results 181 to 190 of about 1,828 (206)

Determination of an optimal measurement configuration in optical scatterometry using global sensitivity analysis

Thin Solid Films, 2014
Shiyuan Liu, Xiuguo Chen, Chuanwei Zhang
exaly  

SCATTEROMETRY SYSTEM AND METHOD

2019
BERDICHEVSKY RUSLAN, GRUBNER EYAL, SEGEV SHAI   +2 more
openaire   +3 more sources

Impact of different stochastic line edge roughness patterns on measurements in scatterometry - A simulation study

Measurement: Journal of the International Measurement Confederation, 2017
M Bar, H Gross
exaly  

Discrete polarization scatterometry

2011
HILL ANDREW V, MANASSEN AMNON, KANDEL DANIEL, LEVINSKI VLADIMIR, SELIGSON JOEL, SVIZHER ALEXANDER, WANG DAVID Y, ROTTER LAWRENCE D, DE VEER JOHANNES D   +8 more
openaire   +2 more sources

Direct mapping of surface plasmon dispersion using imaging scatterometry

Applied Physics Letters, 2013
Pete Vukusic, Alastair P. Hibbins, Thomas J Constant   +2 more
exaly  

Scatterometry for Semiconductor Metrology

2001
openaire   +2 more sources

Scatterometry measurement of sub-0.1 μm linewidth gratings

Journal of Vacuum Science & Technology B, 1998
S Sohail H Naqvi, Christopher J Raymond, Stephen A Coulombe   +2 more
exaly  

Techniques for optimized scatterometry

2013
LLORETA JONATHAN, AOYAGI PAUL, CHU HANYOU, CHARD JEFFREY, JIANG PEILIN, SUSHCHIK MIKHAIL, POSLAVSKY LEONID, FLANNER PHILLIP D   +7 more
openaire   +3 more sources

X-band Scatterometry In Agriculture

International Geoscience and Remote Sensing Symposium, 'Remote Sensing: Moving Toward the 21st Century'., 2005
S. Mihaly, I. Bozoki
openaire   +1 more source

Improved measurement accuracy in optical scatterometry using fitting error interpolation based library search

Measurement: Journal of the International Measurement Confederation, 2013
Shiyuan Liu, Xiuguo Chen, Chuanwei Zhang
exaly