Results 191 to 200 of about 1,828 (206)

INSTRUMENTATION | Scatterometry

2005
openaire   +1 more source

Optical Scatterometry

1993
openaire   +1 more source

Solving the inverse grating problem by white light interference Fourier scatterometry

Light: Science and Applications, 2012
Wolfgang Osten, Karsten Frenner
exaly  

Regularization Methods for Scatterometry Image Reconstruction

IEEE Transactions on Geoscience and Remote Sensing
Gerard Gallardo i Peres, Alba Granados, Maria José Escorihuela   +2 more
openaire   +1 more source

SCATTEROMETRY MEASUREMENT OF ASYMMETRIC STRUCTURES

2011
RABELLO SILVIO J, MCGAHAN WILLIAM A, LI JIE, LIU YONGDONG   +3 more
openaire   +6 more sources

Scatterometry analysis of sequentially imprinted patterns: Influence of thermal parameters

Microelectronic Engineering, 2012
exaly  

Scatterometry method and system

2019
WAINREB GILAD, LITTWIN ETAI, VAID ALOK, KLOTS MICHAEL, BOZDOG CORNEL, SENDELBACH MATTHEW   +5 more
openaire   +1 more source

A practical method for optical dispersion model selection and parameters variations in scatterometry analysis with variable &'s

Thin Solid Films, 2014
exaly  

Characterization of e-beam patterned grating structures using Mueller matrix based scatterometry

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2013
exaly  

Modulated scatterometry

2005
openaire   +3 more sources