Results 151 to 160 of about 11,186 (164)

Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1996
Hu C, Tennant D M, Bokor J
exaly  

Lithography : Manufacturing Technologies in Semiconductor Device

Journal of the Society of Mechanical Engineers, 1986
openaire   +1 more source

Improved particle control for high volume semiconductor manufacturing for nanoimprint lithography

Proceedings of SPIE, 2017
Yukio Takabayashi
exaly  

Lithography reticle scheduling in semiconductor manufacturing

Engineering Optimization
Chia-Yen Lee
exaly  

EL-3 application to 0.5 μm semiconductor lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1983
exaly  

Measuring flare in semiconductor lithography

2006
ZIGER DAVID, ZIEBOLD RALF, GOODWIN FRANK
openaire   +1 more source

System and apparatus for lithography in semiconductor fabrication

2023
WU CHENG-KUAN, CHENG PO-CHUNG, CHEN LI-JUI, SHIH CHIH-TSUNG   +3 more
openaire   +1 more source

Sub-100 nm KrF lithography for complementary metal–oxide–semiconductor circuits

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1999
exaly  

Semiconductor technology roadmaps and lithography implications

Advances in Patterning Materials and Processes XLII
Karey Holland, Steven P. Holland
openaire   +1 more source

Pellicle for use in semiconductor lithography

2009
openaire   +1 more source