Results 141 to 150 of about 11,186 (164)

Reduction of Bubble-Induced Defect in Semiconductor Lithography Process

2023
Kyoung-Whan Oh, Takashi Sasa, Seok Heo, Daejung Kim, Ouiserg Kim, Jung-Hyeon Kim   +5 more
openaire   +1 more source

The Potential for Economic Application of Maskless Lithography in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing, 2010
Robert C Leachman
exaly  

Monolayer graphene-insulator-semiconductor emitter for large-area electron lithography

Applied Physics Letters, 2017
Matthew Kirley
exaly  

Ultrathin semiconductor layer masks for high vacuum focused Ga ion beam lithography

Applied Physics Letters, 1988
Temkin H, Panish M B
exaly  

Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

Annual Review of Materials Research, 2009
C Grant Willson, Michael W Lin
exaly  

Technology Research on the Preparation of DBR Semiconductor Lasers by Electron Beam Lithography

Integrated Ferroelectrics, 2023
exaly  

Masks, lithography device and semiconductor component

2005
MANN HANS-JUERGEN, LOWISCH MARTIN, SINGER WOLFGANG   +2 more
openaire   +3 more sources

A review of nanoimprint lithography for high-volume semiconductor device manufacturing

Advanced Optical Technologies, 2017
Douglas J Resnick
exaly  

APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

1991
JEWELL TANYA E, RODGERS J MICHAEL
openaire   +1 more source

Sustainable Semiconductor Manufacturing: The Role of Lithography

IEEE Transactions on Semiconductor Manufacturing
Emily Gallagher, Lars-Åke Ragnarsson, Cedric Rolin   +2 more
openaire   +1 more source